公开(公告)号：US10234500B2

公开(公告)日：2019-03-19

申请号：US14689088

申请日：2015-04-17

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Weihong Gao ,  Xuefeng Zeng ,  Yan Pan ,  Peter Lin ,  Hoang Nguyen ,  Ho Young Song

IPC: G01R31/04 ,  G01R31/305

Abstract: A method and apparatus for separating real DVC via defects from nuisance based on Net Tracing Classification of eBeam VC die comparison inspection results are provided. Embodiments include performing an eBeam VC die comparison inspection on each via of a plurality of dies; determining DVC vias based on the comparison; performing a Net Tracing Classification on the DVC vias; determining S/D DVC vias based on the Net Tracing Classification; and performing a die repeater analysis on the S/D DVC vias to determine systematic design-related DVC via defects.