公开(公告)号：US09551674B1

公开(公告)日：2017-01-24

申请号：US14928605

申请日：2015-10-30

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yun-Yu Wang ,  John Bruley

IPC: G01N23/00 ,  G01N23/04

CPC classification number: G01N23/04 ,  G01N2223/03 ,  G01N2223/607

Abstract: An inline dark field holographic method for measuring strain in a semiconductor or other crystalline material using a transmission electron microscope having an electron gun for passing an electron beam through strained and unstrained specimens. A condenser mini-lens between the magnetic tilting coil and the specimens increases defection of the beam at an angle with prior to passing through the pair of specimens. The first objective lens forms a virtual image of each of the specimens and the second objective lens focuses the virtual images of each of the specimens at an intermediate image plane to form intermediate images of each of the specimens. The biprism creates the interference pattern between the specimens is formed at the image plane, which may then be viewed to determine the degree of strain of the strained specimen and provides a coma-free strain map with minimal optical distortion.

Abstract translation: 一种用于使用具有电子枪的透射电子显微镜测量半导体或其它结晶材料中的应变的在线暗场全息方法，该电子枪使电子束通过应变和未受限制的样品。 在磁性倾斜线圈和试样之间的聚光镜微透镜会增加与穿过一对试样之间的角度的偏转。 第一物镜形成每个样本的虚像，第二物镜将每个样本的虚拟图像聚焦在中间像平面处以形成每个样本的中间图像。 双棱镜产生在图像平面上形成的样品之间的干涉图案，然后可以观察它们以确定应变样品的应变程度，并提供具有最小光学失真的无消耗应变图。