公开(公告)号：US20140203405A1

公开(公告)日：2014-07-24

申请号：US14220475

申请日：2014-03-20

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Steven R. SOSS ,  Andreas KNORR

IPC: H01L49/02

CPC classification number: H01L28/20

Abstract: A precision resistor is formed with a controllable resistance to compensate for variations that occur with temperature. An embodiment includes forming a resistive semiconductive element having a width and a length on a substrate, patterning an electrically conductive line across the width of the resistive semiconductive element, but electrically isolated therefrom, and forming a depletion channel in the resistive semiconductive element under the electrically conductive line to control the resistance value of the resistive semiconductive element. The design enables dynamic adjustment of the resistance, thereby improving the reliability of the resistor or allowing for resistance modification during final packaging.

Abstract translation: 形成具有可控电阻的精密电阻器，以补偿随温度发生的变化。 一个实施例包括形成在衬底上具有宽度和长度的电阻半导体元件，跨越电阻半导体元件的宽度图形化导电线，但与之电隔离，并且在电气半导体元件下方形成耗尽沟道 导线来控制电阻半导体元件的电阻值。 该设计能够动态调节电阻，从而提高电阻器的可靠性或允许最终封装期间的电阻修改。