公开(公告)号：US10816726B1

公开(公告)日：2020-10-27

申请号：US16549415

申请日：2019-08-23

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Bo Peng ,  Yusheng Bian ,  Ajey Poovannummoottil Jacob ,  Thomas Houghton ,  Asli Sahin

IPC: G02B6/34 ,  G02B6/122 ,  G02B6/38 ,  G02B6/36 ,  G02B6/30

Abstract: Structures for an edge coupler and methods of fabricating a structure for an edge coupler. A waveguide core and a coupler are formed over a layer stack that includes a first dielectric layer and a second dielectric layer over the first dielectric layer. The coupler includes a first plurality of grating structures and a transition structure including a second plurality of grating structures that are positioned between the first plurality of grating structures and the waveguide core. The first plurality of grating structures include respective widths that vary as a function of position relative to the transition structure.