公开(公告)号：US20210133293A1

公开(公告)日：2021-05-06

申请号：US16669808

申请日：2019-10-31

申请人： GLOBALFOUNDRIES U.S. Inc.

发明人： Ahmed Hassan ,  James Culp

IPC分类号： G06F17/50 ,  H01L23/538 ,  H01J37/317 ,  G03F1/20 ,  G03F1/70 ,  G01N21/95

摘要： One illustrative system includes a processor and memory storing instructions that, when executed by the processor, cause the system to receive a device layout including a curvilinear feature, define a plurality of vertices for the curvilinear feature, determine a radius of curvature between a selected vertex in the plurality of vertices and a neighboring vertex in the plurality of vertices, and identify a design rule violation for the curvilinear feature responsive to the radius of curvature being less than a predetermined threshold.

公开(公告)号：US10997355B1

公开(公告)日：2021-05-04

申请号：US16669808

申请日：2019-10-31

申请人： GLOBALFOUNDRIES U.S. Inc.

发明人： Ahmed Hassan ,  James Culp

IPC分类号： G06F30/394 ,  G06F30/398 ,  H01L23/538 ,  G01N21/95 ,  G03F1/20 ,  G03F1/70 ,  H01J37/317

摘要： One illustrative system includes a processor and memory storing instructions that, when executed by the processor, cause the system to receive a device layout including a curvilinear feature, define a plurality of vertices for the curvilinear feature, determine a radius of curvature between a selected vertex in the plurality of vertices and a neighboring vertex in the plurality of vertices, and identify a design rule violation for the curvilinear feature responsive to the radius of curvature being less than a predetermined threshold.