公开(公告)号：US11342248B2

公开(公告)日：2022-05-24

申请号：US16928305

申请日：2020-07-14

Applicant: GaN Systems Inc.

Inventor： Cameron Mcknight-Macneil ,  Greg P. Klowak

IPC: H01L23/495 ,  H01L23/482 ,  H01L23/498 ,  H01L23/522 ,  H01L23/532 ,  H01L29/20 ,  H01L29/778 ,  H01L23/00 ,  H01L23/31

Abstract: Embedded die packaging for high voltage, high temperature operation of power semiconductor devices is disclosed, wherein a power semiconductor die is embedded in laminated body comprising a layer stack of a plurality of dielectric layers and electrically conductive layers. For example, the dielectric layers comprise dielectric build-up layers of filled or fiber reinforced dielectric and conductive interconnect comprises copper layers and copper filled vias. Where a solder resist coating is provided, a dielectric build-up layer, e.g. filled or glass fiber reinforced epoxy, is provided between the solder resist coating and underlying copper interconnect, particularly in regions which experience high electric field during operation, such as between closely spaced source and drain interconnect metal. For example, the power semiconductor device comprises a GaN HEMT rated for operation at ≥100V wherein the package body has a laminated structure configured for high voltage, high temperature operation with improved reliability.