System for maintaining thermal stability of a motion stage
    1.
    发明授权
    System for maintaining thermal stability of a motion stage 有权
    用于保持运动阶段的热稳定性的系统

    公开(公告)号:US08324848B2

    公开(公告)日:2012-12-04

    申请号:US12366275

    申请日:2009-02-05

    摘要: A system for maintaining thermal stability of a motion stage driven by a motor comprises a motion current generator operative to produce a motion current to drive the motion stage to move and a thermal current generator operative to produce a thermal current to dissipate heat in the motion stage for controlling a temperature of the motion stage without producing corresponding movement of the motion stage. A summation controller is operative to combine the motion current with the thermal current, and to produce a combined current output to the motor.

    摘要翻译: 用于维持由电动机驱动的运动台的热稳定性的系统包括运动电流发生器,其运行以产生运动电流以驱动运动级运动,并且热电发生器可操作以产生热电流以在运动级中散热 用于控制运动舞台的温度而不产生运动舞台的相应运动。 总和控制器可操作以将运动电流与热电流组合,并产生组合的电流输出到电动机。

    SYSTEM FOR MAINTAINING THERMAL STABILITY OF A MOTION STAGE
    2.
    发明申请
    SYSTEM FOR MAINTAINING THERMAL STABILITY OF A MOTION STAGE 有权
    维持运动阶段的热稳定性系统

    公开(公告)号:US20100194328A1

    公开(公告)日:2010-08-05

    申请号:US12366275

    申请日:2009-02-05

    IPC分类号: G05B19/404 G05D23/30

    摘要: A system for maintaining thermal stability of a motion stage driven by a motor comprises a motion current generator operative to produce a motion current to drive the motion stage to move and a thermal current generator operative to produce a thermal current to dissipate heat in the motion stage for controlling a temperature of the motion stage without producing corresponding movement of the motion stage. A summation controller is operative to combine the motion current with the thermal current, and to produce a combined current output to the motor.

    摘要翻译: 用于维持由电动机驱动的运动台的热稳定性的系统包括运动电流发生器,其运行以产生运动电流以驱动运动级运动,并且热电发生器可操作以产生热电流以在运动级中散热 用于控制运动舞台的温度而不产生运动舞台的相应运动。 总和控制器可操作以将运动电流与热电流组合,并产生组合的电流输出到电动机。