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    Manufacturing execution system (MES) including a wafer sampling engine (WSE) for a semiconductor manufacturing process
    1.
    发明授权
    Manufacturing execution system (MES) including a wafer sampling engine (WSE) for a semiconductor manufacturing process 有权
    制造执行系统（MES），包括用于半导体制造过程的晶片采样引擎（WSE）

    公开(公告)号：US08565910B2

    公开(公告)日：2013-10-22

    申请号：US13020846

    申请日：2011-02-04

    申请人： Gary W. Behm ,  Malek Ben Salem ,  Yue Li

    发明人： Gary W. Behm ,  Malek Ben Salem ,  Yue Li

    IPC分类号： G05B13/02

    CPC分类号： G05B19/41875 ,  G05B2219/32206 ,  G05B2219/45031 ,  Y02P90/12 ,  Y02P90/22

    摘要： A method of sampling semiconductor wafers includes passing a lot of semiconductor wafers into a semiconductor processing tool, processing a first portion of the lot in one process chamber of the semiconductor processing tool and a second portion of the lot in another process chamber of the semiconductor processing tool to produce processed semiconductor wafers, and initiating a wafer sampling engine to select at least one of the processed semiconductor wafers for sampling. The wafer sampling engine computes a long term process capability index for the processing tool and a short term process performance index for at least one of the processing tool and process chamber, identifies at least one desired sampling measurement type, selects the at least one of the processed semiconductor wafers for sampling, and collects the desired measurement types from the at least one of the processed semiconductor wafers selected for sampling.

    摘要翻译： 采用半导体晶片的方法包括将大量半导体晶片传送到半导体处理工具中，在半导体处理工具的一个处理室中处理批次的第一部分，以及处理半导体处理的另一处理室中的批次的第二部分 制造经处理的半导体晶片的工具，以及启动晶片采样引擎以选择所处理的半导体晶片中的至少一个进行采样。 晶片采样引擎计算用于处理工具的长期工艺能力指数和用于处理工具和处理室中的至少一个的短期工艺性能指标，以识别至少一个期望的采样测量类型，选择至少一个 处理的半导体晶片进行采样，并从被选择用于采样的所处理的半导体晶片中的至少一个收集所需的测量类型。

    METHOD OF PERFORMING MEASUREMENT SAMPLING OF LOTS IN A MANUFACTURING PROCESS
    2.
    发明申请
    METHOD OF PERFORMING MEASUREMENT SAMPLING OF LOTS IN A MANUFACTURING PROCESS 失效
    在制造过程中进行测量采样的方法

    公开(公告)号：US20090234485A1

    公开(公告)日：2009-09-17

    申请号：US12049565

    申请日：2008-03-17

    申请人： Gary W. Behm ,  Yue Li ,  Malek Ben Salem ,  Keith Tabakman

    发明人： Gary W. Behm ,  Yue Li ,  Malek Ben Salem ,  Keith Tabakman

    IPC分类号： G06F17/00

    CPC分类号： G05B19/41875 ,  G05B2219/32097 ,  G05B2219/32199 ,  G05B2219/45031 ,  Y02P90/22

    摘要： A method of performing measurement sampling in a production process includes passing a lot through a manufacturing process, employing a set of combinational logistics to determine if sampling is indicated and, if sampling is indicated, establishing a sampling decision. The method further requires querying a set of lot sampling rules to evaluate the sampling decision, evaluating a statistical quality of the process if no lot sampling rules exist, and automatically determining whether the lot passing through the production process requires sampling based on the combinational logistics, statistical quality and lot sampling rules.

    摘要翻译： 在生产过程中执行测量抽样的方法包括通过制造过程进行许多过程，采用一组组合物流来确定是否指示采样，并且如果指示采样，则建立采样决策。 该方法还需要查询一组抽样规则来评估抽样决策，如果不存在多个抽样规则，则评估过程的统计质量，并自动确定通过生产过程的批次是否需要基于组合物流进行抽样， 统计质量和批次抽样规则。

    MANUFACTURING EXECUTION SYSTEM (MES) INCLUDING A WAFER SAMPLING ENGINE (WSE) FOR A SEMICONDUCTOR MANUFACTURING PROCESS
    3.
    发明申请
    MANUFACTURING EXECUTION SYSTEM (MES) INCLUDING A WAFER SAMPLING ENGINE (WSE) FOR A SEMICONDUCTOR MANUFACTURING PROCESS 有权
    包括用于半导体制造过程的WAEER采样发动机（WSE）的制造执行系统（MES）

    公开(公告)号：US20120203369A1

    公开(公告)日：2012-08-09

    申请号：US13020846

    申请日：2011-02-04

    申请人： Gary W. Behm ,  Malek Ben Salem ,  Yue Li

    发明人： Gary W. Behm ,  Malek Ben Salem ,  Yue Li

    IPC分类号： G06F19/00

    CPC分类号： G05B19/41875 ,  G05B2219/32206 ,  G05B2219/45031 ,  Y02P90/12 ,  Y02P90/22

    摘要： A method of sampling semiconductor wafers includes passing a lot of semiconductor wafers into a semiconductor processing tool, processing a first portion of the lot in one process chamber of the semiconductor processing tool and a second portion of the lot in another process chamber of the semiconductor processing tool to produce processed semiconductor wafers, and initiating a wafer sampling engine to select at least one of the processed semiconductor wafers for sampling. The wafer sampling engine computes a long term process capability index for the processing tool and a short term process performance index for at least one of the processing tool and process chamber, identifies at least one desired sampling measurement type, selects the at least one of the processed semiconductor wafers for sampling, and collects the desired measurement types from the at least one of the processed semiconductor wafers selected for sampling.

    摘要翻译： 采用半导体晶片的方法包括将大量半导体晶片传送到半导体处理工具中，在半导体处理工具的一个处理室中处理批次的第一部分，以及处理半导体处理的另一处理室中的批次的第二部分 制造经处理的半导体晶片的工具，以及启动晶片采样引擎以选择所处理的半导体晶片中的至少一个进行采样。 晶片采样引擎计算用于处理工具的长期工艺能力指数和用于处理工具和处理室中的至少一个的短期工艺性能指标，以识别至少一个期望的采样测量类型，选择至少一个 处理的半导体晶片进行采样，并从被选择用于采样的所处理的半导体晶片中的至少一个收集所需的测量类型。

    Method of performing measurement sampling of lots in a manufacturing process
    4.
    发明授权
    Method of performing measurement sampling of lots in a manufacturing process 失效
    在制造过程中对批次进行测量取样的方法

    公开(公告)号：US07895008B2

    公开(公告)日：2011-02-22

    申请号：US12049565

    申请日：2008-03-17

    申请人： Gary W. Behm ,  Yue Li ,  Malek Ben Salem ,  Keith Tabakman

    发明人： Gary W. Behm ,  Yue Li ,  Malek Ben Salem ,  Keith Tabakman

    IPC分类号： G01N37/00

    CPC分类号： G05B19/41875 ,  G05B2219/32097 ,  G05B2219/32199 ,  G05B2219/45031 ,  Y02P90/22

    摘要： A method of performing measurement sampling in a production process includes passing a lot through a manufacturing process, employing a set of combinational logistics to determine if sampling is indicated and, if sampling is indicated, establishing a sampling decision. The method further requires querying a set of lot sampling rules to evaluate the sampling decision, evaluating a statistical quality of the process if no lot sampling rules exist, and automatically determining whether the lot passing through the production process requires sampling based on the combinational logistics, statistical quality and lot sampling rules.

    摘要翻译： 在生产过程中执行测量抽样的方法包括通过制造过程进行许多过程，采用一组组合物流来确定是否指示采样，并且如果指示采样，则建立采样决策。 该方法还需要查询一组抽样规则来评估抽样决策，如果不存在多个抽样规则，则评估过程的统计质量，并自动确定通过生产过程的批次是否需要基于组合物流进行抽样， 统计质量和批次抽样规则。

    METHOD FOR USING REAL-TIME APC INFORMATION FOR AN ENHANCED LOT SAMPLING ENGINE
    6.
    发明申请
    METHOD FOR USING REAL-TIME APC INFORMATION FOR AN ENHANCED LOT SAMPLING ENGINE 失效
    使用实时APC信息用于增强的大量采样发动机的方法

    公开(公告)号：US20090306803A1

    公开(公告)日：2009-12-10

    申请号：US12135514

    申请日：2008-06-09

    申请人： Gary W. Behm ,  Malek Ben Salem ,  Yue Li

    发明人： Gary W. Behm ,  Malek Ben Salem ,  Yue Li

    IPC分类号： G06F17/00

    CPC分类号： G05B19/41865 ,  G05B2219/31458 ,  G05B2219/32199 ,  G05B2219/32294 ,  Y02P90/20 ,  Y02P90/22

    摘要： A method includes passing a lot through a production process and evaluating a statistical quality of the production process. Additionally, the method includes calculating an advanced process control (APC) recipe parameter adjustment (RPA) distribution value and determining if sampling is indicated. Furthermore, the method includes, if sampling is indicated, performing a measurement process of the lot.

    摘要翻译： 一种方法包括传递许多生产过程并评估生产过程的统计质量。 此外，该方法包括计算高级处理控制（APC）配方参数调整（RPA）分布值并确定是否指示采样。 此外，该方法包括如果指示采样，则执行批次的测量处理。

    Methods, systems, and media for masquerade attack detection by monitoring computer user behavior
    7.
    发明授权
    Methods, systems, and media for masquerade attack detection by monitoring computer user behavior 有权
    通过监控计算机用户行为进行伪装攻击检测的方法，系统和媒体

    公开(公告)号：US08769684B2

    公开(公告)日：2014-07-01

    申请号：US12628587

    申请日：2009-12-01

    申请人： Salvatore J. Stolfo ,  Malek Ben Salem ,  Shlomo Hershkop

    发明人： Salvatore J. Stolfo ,  Malek Ben Salem ,  Shlomo Hershkop

    IPC分类号： G06F21/00 ,  G06F21/55 ,  G06F21/50 ,  H04L29/06 ,  G06F21/56

    CPC分类号： H04L63/1416 ,  G06F21/50 ,  G06F21/55 ,  G06F21/552 ,  G06F21/554 ,  G06F21/566 ,  H04L29/06884 ,  H04L29/06897 ,  H04L63/1408 ,  H04L63/1425 ,  H04L63/1491

    摘要： Methods, systems, and media for masquerade attack detection by monitoring computer user behavior are provided. In accordance with some embodiments, a method for detecting masquerade attacks is provided, the method comprising: monitoring a first plurality of user actions and access of decoy information in a computing environment; generating a user intent model for a category that includes at least one of the first plurality of user actions; monitoring a second plurality of user actions; comparing the second plurality of user actions with the user intent model by determining deviation from the generated user intent model; identifying whether the second plurality of user actions is a masquerade attack based at least in part on the comparison; and generating an alert in response to identifying that the second plurality of user actions is the masquerade attack and in response to determining that the second plurality of user actions includes accessing the decoy information in the computing environment.

    摘要翻译： 提供了通过监控计算机用户行为进行伪装攻击检测的方法，系统和媒体。 根据一些实施例，提供了一种用于检测伪装攻击的方法，所述方法包括：在计算环境中监视第一多个用户动作和诱捕信息的访问; 为包括所述第一多个用户动作中的至少一个的类别生成用户意图模型; 监视第二多个用户动作; 通过确定与所生成的用户意图模型的偏差来比较第二多个用户动作与用户意图模型; 至少部分地基于所述比较来识别所述第二多个用户动作是否是伪装攻击; 以及响应于识别所述第二多个用户动作是所述伪装攻击而响应于响应于确定所述第二多个用户动作包括访问所述计算环境中的诱饵信息而产生警报。

    METHODS, SYSTEMS, AND MEDIA FOR MASQUERADE ATTACK DETECTION BY MONITORING COMPUTER USER BEHAVIOR
    8.
    发明申请
    METHODS, SYSTEMS, AND MEDIA FOR MASQUERADE ATTACK DETECTION BY MONITORING COMPUTER USER BEHAVIOR 有权
    监控计算机用户行为的MASTERERADE攻击检测方法，系统和媒体

    公开(公告)号：US20100269175A1

    公开(公告)日：2010-10-21

    申请号：US12628587

    申请日：2009-12-01

    申请人： Salvatore J. Stolfo ,  Malek Ben Salem ,  Shlomo Hershkop

    发明人： Salvatore J. Stolfo ,  Malek Ben Salem ,  Shlomo Hershkop

    IPC分类号： G06F11/00

    CPC分类号： H04L63/1416 ,  G06F21/50 ,  G06F21/55 ,  G06F21/552 ,  G06F21/554 ,  G06F21/566 ,  H04L29/06884 ,  H04L29/06897 ,  H04L63/1408 ,  H04L63/1425 ,  H04L63/1491

    摘要： Methods, systems, and media for masquerade attack detection by monitoring computer user behavior are provided. In accordance with some embodiments, a method for detecting masquerade attacks is provided, the method comprising: monitoring a first plurality of user actions and access of decoy information in a computing environment; generating a user intent model for a category that includes at least one of the first plurality of user actions; monitoring a second plurality of user actions; comparing the second plurality of user actions with the user intent model by determining deviation from the generated user intent model; identifying whether the second plurality of user actions is a masquerade attack based at least in part on the comparison; and generating an alert in response to identifying that the second plurality of user actions is the masquerade attack and in response to determining that the second plurality of user actions includes accessing the decoy information in the computing environment.

    摘要翻译： 提供了通过监控计算机用户行为进行伪装攻击检测的方法，系统和媒体。 根据一些实施例，提供了一种用于检测伪装攻击的方法，所述方法包括：在计算环境中监视第一多个用户动作和诱捕信息的访问; 为包括所述第一多个用户动作中的至少一个的类别生成用户意图模型; 监视第二多个用户动作; 通过确定与所生成的用户意图模型的偏差来比较第二多个用户动作与用户意图模型; 至少部分地基于所述比较来识别所述第二多个用户动作是否是伪装攻击; 以及响应于识别所述第二多个用户动作是所述伪装攻击而响应于响应于确定所述第二多个用户动作包括访问所述计算环境中的诱饵信息而产生警报。

    METHODS, SYSTEMS, AND MEDIA FOR BAITING INSIDE ATTACKERS
    9.
    发明申请
    METHODS, SYSTEMS, AND MEDIA FOR BAITING INSIDE ATTACKERS 有权
    用于打击攻击者的方法，系统和媒体

    公开(公告)号：US20100077483A1

    公开(公告)日：2010-03-25

    申请号：US12565394

    申请日：2009-09-23

    申请人： Salvatore J. Stolfo ,  Angelos D. Keromytis ,  Brian M. Bowen ,  Shlomo Hershkop ,  Vasileios P. Kemerlis ,  Pratap V. Prabhu ,  Malek Ben Salem

    发明人： Salvatore J. Stolfo ,  Angelos D. Keromytis ,  Brian M. Bowen ,  Shlomo Hershkop ,  Vasileios P. Kemerlis ,  Pratap V. Prabhu ,  Malek Ben Salem

    IPC分类号： G06F11/00

    CPC分类号： G06F21/554 ,  G06F21/552 ,  G06F21/566 ,  G06F2221/034 ,  G06F2221/2123 ,  H04L63/1466

    摘要： Methods, systems, and media for providing trap-based defenses are provided. In accordance with some embodiments, a method for providing trap-based defenses is provided, the method comprising: generating decoy information based at least in part on actual information in a computing environment, wherein the decoy information is generated to comply with one or more document properties; embedding a beacon into the decoy information; and inserting the decoy information with the embedded beacon into the computing environment, wherein the embedded beacon provides a first indication that the decoy information has been accessed by an attacker and wherein the embedded beacon provides a second indication that differentiates between the decoy information and the actual information.

    摘要翻译： 提供了用于提供基于陷阱的防御的方法，系统和媒体。 根据一些实施例，提供了一种用于提供基于陷阱的防御的方法，所述方法包括：至少部分地基于计算环境中的实际信息生成诱饵信息，其中所述诱饵信息被生成以符合一个或多个文档 属性; 将信标嵌入诱饵信息中; 以及将具有所嵌入的信标的诱饵信息插入所述计算环境中，其中所述嵌入式信标提供所述诱饵信息已被攻击者访问的第一指示，并且其中所述嵌入信标提供区分所述诱饵信息和所述实际信息之间的第二指示 信息。