MULTI DEGREE-OF-FREEDOM PIEZOELECTRIC MICRO-ACTUATOR WITH AN ENERGY EFFICIENT ISOLATION STRUCTURE
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    发明申请
    MULTI DEGREE-OF-FREEDOM PIEZOELECTRIC MICRO-ACTUATOR WITH AN ENERGY EFFICIENT ISOLATION STRUCTURE 审中-公开
    具有能量有效隔离结构的多自由度压电微型致动器

    公开(公告)号:US20130038173A1

    公开(公告)日:2013-02-14

    申请号:US13580716

    申请日:2011-02-28

    IPC分类号: H01L41/04 H01L41/047

    摘要: A multi-DOF piezoelectric actuator that may be constructed with sizes of about or less than one millimetre. The multi-DOF piezoelectric actuator is capable of generating motion of a rotor element or slider element, about or in, each of the three fundamental axes of three dimensional space. The actuator can comprise a piezoelectric element (10) having one or more sidefaces, a first endface, and a second endface, wherein at least one or more sidefaces comprise a plurality of separate sideface electrodes (11) and at least one of the first or second endfaces comprise an endface electrode (12). A transducer element (30,40) and isolation structure (5) for use in a piezoelectric actuator are also described.

    摘要翻译: 可以构造为具有大约或小于1毫米的尺寸的多自由度压电致动器。 多自由度压电致动器能够在三维空间的三个基本轴线中的每一个周围产生转子元件或滑块元件的运动。 致动器可以包括具有一个或多个侧面,第一端面和第二端面的压电元件(10),其中至少一个或多个侧面包括多个单独的侧面电极(11)和至少一个第一或第二端面 第二端面包括端面电极(12)。 还描述了用于压电致动器的换能器元件(30,40)和隔离结构(5)。