公开(公告)号：US06444086B1

公开(公告)日：2002-09-03

申请号：US09555905

申请日：2000-08-31

申请人： Gerd Andler ,  Wolfgang Wixwat-Ernst ,  Christoph Metzner ,  Jens-Peter Heinss ,  Klaus Goedicke ,  Siegfried Schiller

发明人： Gerd Andler ,  Wolfgang Wixwat-Ernst ,  Christoph Metzner ,  Jens-Peter Heinss ,  Klaus Goedicke ,  Siegfried Schiller

IPC分类号： C23F100

CPC分类号： C23C14/50 ,  C23C14/022 ,  C23C14/568 ,  F16C33/14

摘要： Existing devices for vacuum coating substrates having different shapes, either in continuous or hatch facilities, are equipped in such a way that several coatings are applied after a coating process. The slide bearings are to be coated with several coats and the coating materials used and the conditions related thereto require the use of several coating techniques. This relates inter alia to conveyance parameters. Existing facilities fail to meet these requirements. According to the invention, such a device comprises several aligned processing chambers. Slide bearings which are held together by positive and non-positive fit in tempered carrier bodies are displaced through said chambers comprising pretreatment, atomization and evaporation chambers using a conveyance system adapted to this process. A tempering device for the carrier bodies is connected upstream from the coating track. Corresponding inlet and outlet channels enable air-to-air conveyance.

摘要翻译： 在连续或舱口设施中具有不同形状的真空涂覆基材的现有装置以这样的方式装备，使得在涂覆工艺之后施加若干涂层。 滑动轴承应涂覆几层，所用的涂层材料和相关条件需要使用几种涂层技术。 这尤其涉及输送参数。 现有设施不符合这些要求。 根据本发明，这种装置包括几个对准的处理室。 通过正和非正配合保持在回火承载体中的滑动轴承通过适于该过程的输送系统而被移动通过包括预处理，雾化和蒸发室的所述室。 用于承载体的回火装置连接在涂层轨迹的上游。 相应的入口和出口通道可进行空气 - 空气输送。