Method for depositing of barrier layers on a plastic substrate as well as coating device therefor and a layer system
    1.
    发明授权
    Method for depositing of barrier layers on a plastic substrate as well as coating device therefor and a layer system 有权
    用于在塑料基板上沉积阻挡层的方法以及其涂覆装置和层系统

    公开(公告)号:US08425738B2

    公开(公告)日:2013-04-23

    申请号:US12418130

    申请日:2009-04-03

    IPC分类号: C23C14/34

    摘要: The present invention refers to a coating device for depositing of barrier layers on a plastic substrate comprising a first coating station for depositing a first layer comprising a metal and a second coating station for depositing a second layer comprising a resin, wherein a treatment station for treating the deposited first layer is arranged between the first and the second coating stations which comprises sputter means for depositing one or several atomic layers or isles of deposition material. The invention further refers to an appropriate method which can be carried out by the coating device and to a layer system produced thereby.

    摘要翻译: 本发明涉及一种用于在塑料基板上沉积阻挡层的涂覆装置,包括用于沉积包括金属的第一层的第一涂覆站和用于沉积包含树脂的第二层的第二涂覆站,其中处理站用于处理 沉积的第一层布置在第一和第二涂覆站之间,其包括用于沉积一个或几个原子层或沉积材料岛的溅射装置。 本发明还涉及可以由涂布装置和由其制造的层系统执行的适当方法。

    METHOD FOR DEPOSITING OF BARRIER LAYERS ON A PLASTIC SUBSTRATE AS WELL AS COATING DEVICE THEREFOR AND A LAYER SYSTEM
    2.
    发明申请
    METHOD FOR DEPOSITING OF BARRIER LAYERS ON A PLASTIC SUBSTRATE AS WELL AS COATING DEVICE THEREFOR AND A LAYER SYSTEM 有权
    在塑料基材上沉积障碍层的方法,其作为其涂层装置和层系统

    公开(公告)号:US20090324972A1

    公开(公告)日:2009-12-31

    申请号:US12418130

    申请日:2009-04-03

    IPC分类号: B32B15/04 C23C14/34 B32B9/04

    摘要: The present invention refers to a coating device for depositing of barrier layers on a plastic substrate comprising a first coating station for depositing a first layer comprising a metal and a second coating station for depositing a second layer comprising a resin, wherein a treatment station for treating the deposited first layer is arranged between the first and the second coating stations which comprises sputter means for depositing one or several atomic layers or isles of deposition material. The invention further refers to an appropriate method which can be carried out by the coating device and to a layer system produced thereby.

    摘要翻译: 本发明涉及一种用于在塑料基板上沉积阻挡层的涂覆装置,包括用于沉积包括金属的第一层的第一涂覆站和用于沉积包含树脂的第二层的第二涂覆站,其中处理站用于处理 沉积的第一层布置在第一和第二涂覆站之间,其包括用于沉积一个或几个原子层或沉积材料岛的溅射装置。 本发明还涉及可以由涂布装置和由其制造的层系统执行的适当方法。