公开(公告)号：US20240336048A1

公开(公告)日：2024-10-10

申请号：US18577458

申请日：2022-07-06

Applicant: TOYOBO CO., LTD.

Inventor： Mitsuhiro KASHIWA ,  Atsushi YAMAZAKI ,  Mahiro NAKANO

IPC: B32B27/32 ,  B32B27/08 ,  B32B27/16 ,  C09D175/06 ,  C23C14/08 ,  C23C14/10 ,  C23C14/20 ,  C23C14/30

CPC classification number: B32B27/32 ,  B32B27/08 ,  B32B27/16 ,  C09D175/06 ,  C23C14/081 ,  C23C14/10 ,  C23C14/20 ,  C23C14/30 ,  B32B2250/03 ,  B32B2250/242 ,  B32B2255/10 ,  B32B2255/20 ,  B32B2255/205 ,  B32B2255/26 ,  B32B2255/28 ,  B32B2270/00 ,  B32B2307/518 ,  B32B2307/538 ,  B32B2307/7244 ,  B32B2307/7246

Abstract: The invention provides a laminated film that can form a laminated structure mainly composed of a polypropylene film and composed of substantially a single resin species having a low environmental load, and has gas barrier properties required for a packaging material when an inorganic thin film layer is laminated. The laminated film for forming an inorganic thin film layer, includes a substrate layer mainly composed of a polypropylene-based resin; and a coating layer laminated on at least one surface of the substrate layer, wherein (I) the laminated film has a heating elongation rate at 130° C. of 10% or less in both MD and TD directions, (II) a total of a maximum peak height (Rp) and maximum valley depth (Rv) of the coating layer-side surface measured with a scanning probe microscope is 30.0 nm or less, and (III) an amount of adhesion of the coating layer is 0.10-0.50 g/m2.

公开(公告)号：US12024767B2

公开(公告)日：2024-07-02

申请号：US17312925

申请日：2019-10-31

Applicant: Konica Minolta, Inc.

Inventor： Jinichi Kasuya ,  Kazunari Tada

IPC: G02B1/115 ,  C23C14/02 ,  C23C14/08 ,  C23C14/10 ,  C23C14/30 ,  C23C14/34

CPC classification number: C23C14/10 ,  C23C14/024 ,  C23C14/081 ,  C23C14/083 ,  C23C14/30 ,  C23C14/34 ,  G02B1/115

Abstract: A dielectric film is provided on a transparent substrate. The dielectric film has at least one low refractive index layer. An uppermost layer of the dielectric film contains SiO2 and has a film density of 92% or more. The uppermost layer contains an element having an electronegativity smaller than Si.

公开(公告)号：US20240183021A1

公开(公告)日：2024-06-06

申请号：US18285870

申请日：2022-03-31

Applicant: Toray Advanced Film Co., Ltd.

Inventor： Yoshikazu Sato ,  Yoshiro Murofushi ,  Kodai Tokunaga ,  Makoto Sato

IPC: C23C14/08 ,  C23C14/24

CPC classification number: C23C14/081 ,  C23C14/24

Abstract: A laminate has a layer A on at least one side of a base material, in which the layer A contains at least aluminum (Al) and oxygen (O), and when a site corresponding to 5.0 to 25.0%, a site corresponding to 40.0 to 60.0%, and a site corresponding to 75.0 to 95.0%, in terms of length in a depth direction in the layer A, are defined as an X portion, a Y portion, and a Z portion, respectively, there are sites having a different composition ratio O/Al of aluminum (Al) and oxygen (O). There are provided a laminate that exhibits high productivity and less variation in gas barrier properties even with a thin film configuration, and a method for manufacturing a laminate.

公开(公告)号：US11897811B2

公开(公告)日：2024-02-13

申请号：US17589498

申请日：2022-01-31

Applicant: INTEVAC, INC.

Inventor： Terry Bluck ,  Wendell Thomas Blonigan

IPC: C23C14/34 ,  C03C17/34 ,  C23C14/54 ,  C23C14/00 ,  C23C14/10 ,  C23C14/08 ,  C23C14/50 ,  C08J7/04 ,  C23C14/56 ,  H01J37/32 ,  B05D5/06 ,  B32B17/10 ,  C03C17/42 ,  G02B1/111 ,  G02B1/116

CPC classification number: C03C17/3417 ,  B05D5/063 ,  B32B17/10174 ,  C03C17/3441 ,  C03C17/3482 ,  C03C17/42 ,  C08J7/0423 ,  C23C14/0052 ,  C23C14/0089 ,  C23C14/081 ,  C23C14/10 ,  C23C14/3442 ,  C23C14/3464 ,  C23C14/505 ,  C23C14/548 ,  C23C14/568 ,  G02B1/111 ,  G02B1/116 ,  H01J37/32899 ,  C03C2217/734 ,  C03C2217/76

Abstract: A processing system for forming an optical coating on a substrate is provided, wherein the optical coating including an anti-reflective coating and an oleophobic coating, the system comprising: a linear transport processing section configured for processing and transporting substrate carriers individually and one at a time in a linear direction; at least one evaporation processing system positioned in the linear transport processing system, the evaporation processing system configured to form the oleophobic coating; a batch processing section configured to transport substrate carriers in unison about an axis; at least one ion beam assisted deposition processing chamber positioned in the batch processing section, the ion beam assisted deposition processing chamber configured to deposit layer of the anti-reflective coating; a plurality of substrate carriers for mounting substrates; and, means for transferring the substrate carriers between the linear transport processing section and the batch processing section without exposing the substrate carrier to atmosphere.

公开(公告)号：US20240026521A1

公开(公告)日：2024-01-25

申请号：US18134296

申请日：2023-04-13

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Inhwan LEE ,  Kangbin BAE

IPC: C23C14/08 ,  C23C14/30 ,  C23C14/02

CPC classification number: C23C14/083 ,  C23C14/30 ,  C23C14/02 ,  C23C14/081 ,  H01L21/6833

Abstract: A plasma-resistant member includes a lower layer disposed on a substrate and including yttrium oxide, a buffer layer disposed on the lower layer, and an upper layer disposed on the buffer layer and including yttrium oxyfluoride or fluorine-rich yttrium oxide, wherein the buffer layer has a thermal expansion coefficient between a thermal expansion coefficient of the upper layer and a thermal expansion coefficient of the lower layer.

公开(公告)号：US20230287557A1

公开(公告)日：2023-09-14

申请号：US17691537

申请日：2022-03-10

Applicant: Yimin Hu ,  Feng Niu ,  Wei Lu

Inventor： Yimin Hu ,  Feng Niu ,  Wei Lu

IPC: C23C14/30 ,  C23C14/08 ,  C23C28/00

CPC classification number: C23C14/30 ,  C23C14/081 ,  C23C14/083 ,  C23C28/3455

Abstract: This invention provides a process or fabrication method of forming broadband anti-reflective (AR) coating over the mid-IR fluoride fiber for high power laser applications in mid-IR wavelength range. The AR coating consists of multiple-pair Lithium fluoride (LiF) and Al2O3, and was deposited by electron beam physical vapor deposition with an iron assistant source at low temperature (

公开(公告)号：US11718905B2

公开(公告)日：2023-08-08

申请号：US16624233

申请日：2018-05-30

Applicant: TECHNETICS GROUP LLC

Inventor： Nader Kalkhoran ,  Eric Tobin ,  Tim Egge ,  Jason Burns ,  Rick Oliver ,  Angus McFadden ,  Jason Wright

IPC: C23C14/08 ,  C23C14/06 ,  C23C14/24 ,  C23C28/04 ,  C23C28/00 ,  H01J37/32 ,  C23C14/22

CPC classification number: C23C14/081 ,  C23C14/0694 ,  C23C14/083 ,  C23C14/221 ,  C23C14/24 ,  C23C28/042 ,  C23C28/42 ,  H01J37/32477 ,  H01J37/32715

Abstract: Techniques for depositing a functionally integrated coating structure on a substrate are provided. An example method according to the disclosure includes receiving the substrate into a process chamber of a multi-process ion beam assisted deposition system, disposing the substrate in a first zone including a first evaporator species and a first ion beam, wherein the first evaporator species is Aluminum Oxide (Al2O3), disposing the substrate in a second zone including a second evaporator species and a second ion beam, wherein the second evaporator species is Yttrium Oxide (Y2O3), and disposing the substrate in a third zone including a third evaporator species and a third ion beam, wherein the third evaporator species is Yttrium Fluoride (YF3).

公开(公告)号：US11714221B2

公开(公告)日：2023-08-01

申请号：US17220370

申请日：2021-04-01

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Matthew C. George ,  Shaun Ogden ,  Brian Bowers

IPC: G02B5/30 ,  G02F1/1335 ,  G02B1/14 ,  G02B1/18 ,  C23C14/12 ,  C23C14/34 ,  C23C14/08 ,  C23C16/30 ,  C23C14/58 ,  C23C28/04 ,  C23C16/455 ,  C23C14/00 ,  C03B19/14

CPC classification number: G02B5/3058 ,  C23C14/0036 ,  C23C14/081 ,  C23C14/12 ,  C23C14/34 ,  C23C14/345 ,  C23C14/5873 ,  C23C16/30 ,  C23C16/45525 ,  C23C28/04 ,  G02B1/14 ,  G02B1/18 ,  G02F1/133548 ,  C03B19/1438 ,  C03C2218/10 ,  C03C2218/111 ,  G02B5/3025

Abstract: A method for making a wire grid polarizer (WGP) can provide WGPs with high temperature resistance, robust wires, oxidation resistance, and corrosion protection. In one embodiment, the method can comprise: (a) providing an array of wires on a bottom protection layer; (b) applying a top protection layer on the wires, spanning channels between wires; then (c) applying an upper barrier-layer on the top protection layer and into the channels through permeable junctions in the top protection layer. In a variation of this embodiment, the method can further comprise applying a lower barrier-layer before applying the top protection layer. In another variation, the bottom protection layer and the top protection layer can include aluminum oxide. In another embodiment, the method can comprise applying on the WGP an amino phosphonate then a hydrophobic chemical.

公开(公告)号：US11713503B2

公开(公告)日：2023-08-01

申请号：US16392619

申请日：2019-04-24

Applicant: Hong Kong Baptist University ,  Cathay Photonics Limited

Inventor： Kok Wai Cheah ,  Wing Yui Lam ,  Yu Wai Chan ,  Shing Chi Tse ,  Suet Ying Ching ,  Hoi Lam Tam

IPC: C23C14/02 ,  C23C14/08 ,  C23C14/22 ,  C03C3/06 ,  C23C14/34 ,  C23C14/10 ,  C03C17/245 ,  C03C17/36 ,  C23C14/30 ,  C23C14/58

CPC classification number: C23C14/081 ,  C03C3/06 ,  C03C17/245 ,  C03C17/36 ,  C03C17/3639 ,  C03C17/3644 ,  C03C17/3649 ,  C23C14/024 ,  C23C14/10 ,  C23C14/221 ,  C23C14/30 ,  C23C14/34 ,  C23C14/3464 ,  C23C14/5806 ,  C03C2217/214 ,  C03C2218/15 ,  C03C2218/32 ,  C03C2218/328 ,  C03C2218/33

Abstract: A method for forming a substrate with a multi-layered, flexible, and anti-scratch metal oxides protective coating being deposited onto the substrate is provided in the present invention, wherein the top most layer of the coating comprises Al2O3 or a mixture thereof such that the top most layer acts as an anti-scratching layer. The multi-layered, flexible and anti-scratch metal oxides protective coating also retains the flexibility of the underlying substrate.

公开(公告)号：US20230221467A1

公开(公告)日：2023-07-13

申请号：US18118904

申请日：2023-03-08

Applicant: CORNING INCORPORATED

Inventor： Robert Alan Bellman ,  Shandon Dee Hart ,  Karl William Koch, III ,  Carlo Anthony Kosik Williams ,  Charles Andrew Paulson ,  James Joseph Price

IPC: G02B1/14 ,  G02B5/28 ,  C03C17/34 ,  C23C14/00 ,  C23C14/08 ,  C23C14/22 ,  C03C21/00 ,  B29D11/00 ,  G02B1/115 ,  C23C14/10 ,  C23C14/34 ,  C23C14/35

CPC classification number: G02B1/14 ,  G02B5/28 ,  C03C17/3435 ,  C23C14/0047 ,  C23C14/08 ,  C23C14/225 ,  C03C21/002 ,  B29D11/00865 ,  C23C14/0078 ,  C23C14/081 ,  C23C14/082 ,  G02B1/115 ,  C23C14/10 ,  C23C14/34 ,  C03C2217/734 ,  C03C2217/91 ,  C23C14/083 ,  C03C2217/78 ,  C23C14/352

Abstract: A coated article is described herein that may comprise a substrate and an optical coating. The substrate may have a major surface comprising a first portion and a second portion. A first direction that is normal to the first portion of the major surface may not be equal to a second direction that is normal to the second portion of the major surface. The optical coating may be disposed on at least the first portion and the second portion of the major surface. The coated article may exhibit at the first portion of the substrate and at the second portion of the substrate hardness of about 8 GPa or greater at an indentation depth of about 50 nm or greater as measured on the anti-reflective surface by a Berkovich Indenter Hardness Test.