公开(公告)号：US20180341077A1

公开(公告)日：2018-11-29

申请号：US16055243

申请日：2018-08-06

Applicant: Gigaphoton Inc.

Inventor： Yukio WATANABE ,  Hiroshi SOMEYA ,  Yuki KAWASHIMA ,  Yuto TANAKA

IPC: G02B6/42 ,  G03F7/20 ,  H05G2/00

CPC classification number: G02B6/4296 ,  G03F7/70033 ,  G03F7/70991 ,  H05G2/008

Abstract: An optical unit and an optical path tube are easily connected. A structure of connection between a side surface (1a) of the optical unit and the optical path tube includes: an extensible tube (72) constituting at least a part of the optical path tube, the extensible tube being extensible in a tube axis direction; a flange (26) attached to one end of the optical path tube; a flange receiving part (20) provided on the optical unit, the flange receiving part (20) receiving a front surface (26a) of the flange (26), the front surface (26a) of the flange (26) being an end surface on an open side; and a biasing part (23, 72) configured to bias at least a part of the optical path tube in a direction in which the extensible tube (72) extends.