公开(公告)号：US20210364927A1

公开(公告)日：2021-11-25

申请号：US17228000

申请日：2021-04-12

Applicant: Gigaphoton Inc.

Inventor： Tsukasa HORI ,  Yutaka SHIRAISHI ,  Toshihiro NISHISAKA ,  Hiroshi SOMEYA ,  Yukio WATANABE

IPC: G03F7/20 ,  H05G2/00

Abstract: A target supply device may include a first container configured to contain a target substance, a second container configured to contain the target substance supplied from the first container, a first valve disposed between the first container and the second container, a first pipe connected to the second container and configured to supply pressurized gas to the second container, a third container configured to contain the target substance supplied from the second container, a second valve disposed between the second container and the third container, a second pipe connected to the third container and configured to supply pressurized gas to the third container, and a nozzle configured to output the target substance supplied from the third container.

公开(公告)号：US20190021159A1

公开(公告)日：2019-01-17

申请号：US16121340

申请日：2018-09-04

Applicant: GIGAPHOTON INC.

Inventor： Hisashi NARA ,  Hiroshi SOMEYA ,  Takuya ISHII

IPC: H05G2/00 ,  G21K1/06 ,  G02B5/20

Abstract: An extreme ultraviolet light sensor unit according to one aspect of the present disclosure includes a mirror configured to reflect extreme ultraviolet light, a filter configured to transmit the extreme ultraviolet light reflected by the mirror, an optical sensor configured to detect the extreme ultraviolet light having passed through the filter, a purge gas supply unit disposed to supply purge gas to a space between the mirror and the filter, and a pipe part configured to allow plasma light including the extreme ultraviolet light entering from an opening to pass therethrough toward the mirror and allow the purge gas flowing to the space between the mirror and the filter to flow out of the opening.

公开(公告)号：US20180341077A1

公开(公告)日：2018-11-29

申请号：US16055243

申请日：2018-08-06

Applicant: Gigaphoton Inc.

Inventor： Yukio WATANABE ,  Hiroshi SOMEYA ,  Yuki KAWASHIMA ,  Yuto TANAKA

IPC: G02B6/42 ,  G03F7/20 ,  H05G2/00

CPC classification number: G02B6/4296 ,  G03F7/70033 ,  G03F7/70991 ,  H05G2/008

Abstract: An optical unit and an optical path tube are easily connected. A structure of connection between a side surface (1a) of the optical unit and the optical path tube includes: an extensible tube (72) constituting at least a part of the optical path tube, the extensible tube being extensible in a tube axis direction; a flange (26) attached to one end of the optical path tube; a flange receiving part (20) provided on the optical unit, the flange receiving part (20) receiving a front surface (26a) of the flange (26), the front surface (26a) of the flange (26) being an end surface on an open side; and a biasing part (23, 72) configured to bias at least a part of the optical path tube in a direction in which the extensible tube (72) extends.

公开(公告)号：US20150226935A1

公开(公告)日：2015-08-13

申请号：US14697260

申请日：2015-04-27

Applicant: GIGAPHOTON INC.

Inventor： Hiroshi SOMEYA ,  Yukio WATANABE ,  Katsuhiko WAKANA ,  Osamu WAKABAYASHI

IPC: G02B7/18 ,  G02B5/10 ,  G02B5/08

CPC classification number: G02B7/181 ,  G02B5/0891 ,  G02B5/10 ,  G03F7/70033 ,  G03F7/70175

Abstract: A mirror device may include: a mirror including a base plate, a reflective film on a first surface of the base plate, and a plurality of first protrusions on a second surface of the base plate; a plurality of support parts for respectively supporting the plurality of the first protrusions, each support part having a groove formed therein for guiding the first protrusion; and a plurality of clamps for respectively pressing the plurality of the first protrusions against the respective grooves in the plurality of the support parts.

Abstract translation: 反射镜装置可以包括：反射镜，包括基板，在基板的第一表面上的反射膜，以及在基板的第二表面上的多个第一突起; 多个用于分别支撑多个第一突起的支撑部分，每个支撑部分具有形成在其中的槽，用于引导第一突起; 以及多个夹具，用于分别将多个第一突起抵靠在多个支撑部分中的相应凹槽上。

公开(公告)号：US20210103118A1

公开(公告)日：2021-04-08

申请号：US17003284

申请日：2020-08-26

Applicant: Gigaphoton Inc.

Inventor： Hiroshi SOMEYA ,  Yukio WATANABE

IPC: G02B7/02 ,  G03F7/20

Abstract: An optical apparatus may include a housing having an opened front face, an optical unit freely movable into and out of an internal space of the housing through the front face, and a positioning portion disposed on a back side of the optical unit in the internal space. A base plate of the optical unit may include first and second convex portions disposed on a base end face of the base plate. The second convex portion may be disposed at a position different from the first convex portion in a width direction of the base plate. The positioning portion may include a V block having a V groove shape at a part contacting the first convex portion, and a flat block having a flat surface shape at a part contacting the second convex portion. The optical unit may be positioned in the internal space through the contact.

公开(公告)号：US20140216576A1

公开(公告)日：2014-08-07

申请号：US14172535

申请日：2014-02-04

Applicant: GIGAPHOTON INC.

Inventor： Hiroshi SOMEYA ,  Hideto SAITO

IPC: H05G2/00

CPC classification number: H05G2/008 ,  H05G2/006 ,  Y10T137/8376

Abstract: A gas lock device may include a chamber having a passage section and a connection hole that connects a surface to the passage section, an optical element that is attached to the chamber and seals the passage section, a gas supply apparatus, and a pipe that is attached at one end to the gas supply apparatus and attached at the other end to the chamber, and may define a flow channel communicating with the connection hole.

Abstract translation: 气体锁定装置可以包括具有通道部分和将表面连接到通道部分的连接孔的腔室，附接到腔室并密封通道部分的光学元件，气体供应装置和管子， 在一端连接到气体供应装置并且在另一端附接到腔室，并且可以限定与连接孔连通的流动通道。

公开(公告)号：US20130206863A1

公开(公告)日：2013-08-15

申请号：US13675790

申请日：2012-11-13

Applicant: GIGAPHOTON INC.

Inventor： Takayuki YABU ,  Yukio WATANABE ,  Toshihiro NISHISAKA ,  Hiroshi SOMEYA ,  Osamu WAKABAYASHI

IPC: B05B17/06

CPC classification number: B05B17/0607 ,  B05B12/082

Abstract: A target supply device includes a target supply device body including a nozzle having a through-hole through which a target material is discharged, a piezoelectric member having first and second surfaces and connected to the target supply device body at the first surface, the piezoelectric member being configured such that a distance between the first and second surfaces changes in according with an externally supplied electric signal, an elastic member having first and second ends and connected to the second surface of the piezoelectric member at the first end, the elastic member being configured such that a distance between the first and second ends extends or contract in accordance with an externally applied force, and a regulating member configured to regulate a distance between the second end of the elastic member and the target supply device body.

Abstract translation: 目标供给装置包括目标供给装置主体，具有喷嘴，喷嘴具有目标材料排出的通孔，具有第一表面和第二表面并在第一表面连接到目标供给装置主体的压电部件，压电部件 被构造为使得第一和第二表面之间的距离根据外部供应的电信号而变化，弹性构件具有第一端和第二端并且在第一端处连接到压电构件的第二表面，弹性构件被构造成 使得第一和第二端之间的距离根据外部施加的力而延伸或收缩;以及调节构件，其构造成调节弹性构件的第二端和目标供给装置主体之间的距离。