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公开(公告)号：US06233087B1
公开(公告)日：2001-05-15
申请号：US09216374
申请日：1998-12-18
申请人： Gilbert A. Hawkins , John A. Lebens , Constantine N. Anagnostopoulos , John C. Brazas, Jr. , Brian E. Kruschwitz , Marek W. Kowarz
发明人： Gilbert A. Hawkins , John A. Lebens , Constantine N. Anagnostopoulos , John C. Brazas, Jr. , Brian E. Kruschwitz , Marek W. Kowarz
IPC分类号： G02B2600
CPC分类号： G02B26/0808 , G02B5/1828
摘要： An electro-mechanical grating device for diffracting an incident light beam has a base which defines a surface. A spacer layer is provided above the base, said spacer layer defining an upper surface of said spacer layer. A longitudinal channel is formed in said spacer layer. A plurality of spaced apart deformable ribbon elements are disposed parallel to each other and span the channel. The deformable ribbon elements define a ribbon structure which comprises at least one layer of a single material. The ribbon elements and the electro-mechanical grating device are formed so that charge build-up in layers of the electro-mechanical grating device can be avoided during operation of the device.
摘要翻译： 用于衍射入射光束的机电光栅装置具有限定表面的基部。 间隔层设置在基底之上，所述间隔层限定所述间隔层的上表面。 在所述间隔层中形成纵向通道。 多个间隔开的可变形的带状元件彼此平行设置并跨越通道。 可变形的带元件限定了包括至少一层单一材料的带状结构。 形成带状元件和电 - 机械光栅装置，使得可以在器件的操作期间避免电 - 机械光栅装置的层中的电荷积聚。
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公开(公告)号：US06252697B1
公开(公告)日：2001-06-26
申请号：US09216289
申请日：1998-12-18
申请人： Gilbert A. Hawkins , John A. Lebens , Constantine N. Anagnostopoulos , John C. Brazas, Jr. , Brian E. Kruschwitz
发明人： Gilbert A. Hawkins , John A. Lebens , Constantine N. Anagnostopoulos , John C. Brazas, Jr. , Brian E. Kruschwitz
IPC分类号： G02B2600
CPC分类号： G02B5/1828 , G02B26/0808
摘要： A mechanical grating device for diffracting an incident light beam has a base which defines a surface. A spacer layer is provided above the base, said spacer layer defining an upper surface of said spacer layer. A longitudinal channel is formed in said spacer layer, said channel having a first and second opposing side walls and a bottom. The side walls are substantially vertically disposed with respect to the bottom, and said channel having a constant cross section along the entire length of the mechanical grating device. A plurality of spaced apart deformable ribbon elements are disposed parallel to each other and span the channel. The deformable ribbon elements are fixed to the upper surface of the spacer layer on each side of the channel.
摘要翻译： 用于衍射入射光束的机械光栅装置具有限定表面的基部。 间隔层设置在基底之上，所述间隔层限定所述间隔层的上表面。 在所述间隔层中形成纵向通道，所述通道具有第一和第二相对的侧壁和底部。 侧壁相对于底部基本上垂直设置，并且所述通道沿着机械光栅装置的整个长度具有恒定的横截面。 多个间隔开的可变形的带状元件彼此平行设置并跨越通道。 可变形的带状元件固定在通道的每一侧上的隔离层的上表面。
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3.发明授权
公开(公告)号：US6144481A
公开(公告)日：2000-11-07
申请号：US215106
申请日：1998-12-18
CPC分类号： G02B26/0808 , G02B5/1828 , H04N5/7416
摘要： A method is disclosed for actuating electromechanical ribbon elements which are suspended over a channel. The channel defines a bottom surface having a bottom conductive layer formed below said bottom surface. A data generator provides a data stream. The data generator is connected to a modulator for generating from said data stream a modulated bipolar voltage signal whose time average is equal to the time average of a bias voltage applied to the bottom conductive layer. The data generator and the modulator are necessary to carry out the method. The method comprises the steps of: providing a data stream; generating from said data stream a modulated bipolar voltage signal whose time average is equal to the time average of a bias voltage applied to the bottom conductive layer; and applying said modulated bipolar voltage signal to the ribbon elements.
摘要翻译： 公开了用于致动机电带状元件的方法，其悬挂在通道上。 通道限定了在所述底表面下方形成底部导电层的底表面。 数据生成器提供数据流。 数据发生器连接到调制器，用于从所述数据流产生调制双极性电压信号，其时间平均值等于施加到底部导电层的偏置电压的时间平均值。 数据发生器和调制器是执行该方法所必需的。 该方法包括以下步骤：提供数据流; 从所述数据流产生调制的双极性电压信号，其时间平均值等于施加到所述底部导电层的偏置电压的时间平均值; 以及将所述调制的双极性电压信号施加到所述带状元件。
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4.发明授权Mechanical grating device with optical coating and method of making mechanical grating device with optical coating 有权具有光学涂层的机械光栅装置和制造具有光学涂层的机械光栅装置的方法公开(公告)号：US06181458B2
公开(公告)日：2001-01-30
申请号：US09216054
申请日：1998-12-18
IPC分类号： G02B2600
CPC分类号： G02B26/0808
摘要： A mechanical grating device for enhancing the reflective properties is presented. A mechanical grating has a plurality of parallel ribbon elements which are suspended above a channel. An incident light beam is modulated by the actuation of selected ribbon elements. The actuation of the ribbon elements, which changes the height of the ribbon elements relative to the substrate, is a result of an applied voltage that produces an electrostatic force. On the top surface of the ribbon elements is a coating of reflective metal upon which is an optical coating is provided. The optical coating is a stack of at least two different materials with different refractive indices. The thickness and the composition of the sequential layers in the stack are chosen to produce certain desired reflective properties. Embodiments are presented for reducing the mechanical effects of the dielectric optical coating.
摘要翻译： 提出了一种用于增强反射性能的机械光栅装置。 机械光栅具有悬挂在通道上方的多个平行的带状元件。 通过所选丝带元件的致动来调制入射光束。 丝带元件相对于基底的高度改变的带状元件的致动是产生静电力的施加电压的结果。 在带状元件的顶表面上是反射金属的涂层，其上设有光学涂层。 光学涂层是具有不同折射率的至少两种不同材料的叠层。 选择堆叠中的顺序层的厚度和组成以产生某些所需的反射性质。 呈现了用于降低介电光学涂层的机械效应的实施例。
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公开(公告)号：US06243194B1
公开(公告)日：2001-06-05
申请号：US09216331
申请日：1998-12-18
IPC分类号： G02B2600
CPC分类号： G02B5/1861 , G02B26/0808
摘要： A electro-mechanical grating device for diffracting an incident light beam has a base which defines a surface. A spacer layer is provided above the base, said spacer layer defining an upper surface of said spacer layer. A longitudinal channel is formed in said spacer layer, said channel having a first and second opposing side walls and a bottom. The side walls are substantially vertically disposed with respect to the bottom, and said channel having a constant cross section along the entire length of the mechanical grating device. A plurality of spaced apart deformable ribbon elements are disposed parallel to each other and span the channel. The deformable ribbon elements are fixed to the upper surface of the spacer layer on each side of the channel. A bottom conductive layer is provided within said base and said bottom conductive layer is limited essentially to the cross-section of the channel.
摘要翻译： 用于衍射入射光束的机电光栅装置具有限定表面的基部。 间隔层设置在基底之上，所述间隔层限定所述间隔层的上表面。 在所述间隔层中形成纵向通道，所述通道具有第一和第二相对的侧壁和底部。 侧壁相对于底部基本上垂直设置，并且所述通道沿着机械光栅装置的整个长度具有恒定的横截面。 多个间隔开的可变形的带状元件彼此平行设置并跨越通道。 可变形的带状元件固定在通道的每一侧上的隔离层的上表面。 底部导电层设置在所述基底内，并且所述底部导电层基本上受限于通道的横截面。
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6.发明授权
公开(公告)号：US6038057A
公开(公告)日：2000-03-14
申请号：US215728
申请日：1998-12-18
CPC分类号： G02B26/0808 , G02B5/1828
摘要： A method is disclosed for actuating electro-mechanical ribbon elements which are suspended over a channel. The channel defines a bottom surface and having a bottom conductive layer formed below said bottom surface. A data generator provides a data stream. The data generator is connected to a modulator. Additionally, an actuation voltage generator, connected to the modulator, produces a periodic high frequency voltage signal that has a frequency close to mechanical resonant frequency .function..sub.R of the ribbon elements. The signal from the modulator is applied to the ribbon elements 31 of the electro-mechanical grating device.
摘要翻译： 公开了用于致动悬挂在通道上的机电带元件的方法。 通道限定底表面并且具有形成在所述底表面下方的底部导电层。 数据生成器提供数据流。 数据发生器连接到调制器。 另外，连接到调制器的致动电压发生器产生频率接近带状元件的机械谐振频率fR的周期性高频电压信号。 来自调制器的信号被施加到机电光栅装置的带状元件31。
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7.发明授权公开(公告)号：US06426237B2
公开(公告)日：2002-07-30
申请号：US09867928
申请日：2001-05-30
IPC分类号： H01L21302
CPC分类号： B81C1/00611 , B81C2201/0121
摘要： A method for producing optically planar surfaces for micro-electromechanical system devices (MEMS), comprising the steps of: depositing a first layer over a substrate; forming a channel in the first layer wherein the channel has a depth defined by a thickness of the first layer and a width greater than 10 microns; depositing a second layer over the first layer wherein the second layer has a thickness greater than the depth of the channel and is composed of a different material than the first layer; removing the second layer from outside the channel leaving an overlap at the edge of the channel; and polishing the second layer that fills the channel to obtain an optically planar surface for the MEMS device.
摘要翻译： 一种用于制造用于微机电系统装置（MEMS）的光学平面的方法，包括以下步骤：在衬底上沉积第一层; 在第一层中形成通道，其中通道具有由第一层的厚度和大于10微米的宽度限定的深度; 在所述第一层上沉积第二层，其中所述第二层的厚度大于所述沟道的深度，并且由与所述第一层不同的材料构成; 从所述通道外部移除所述第二层，在所述通道的边缘处留下重叠; 并抛光填充通道的第二层以获得用于MEMS器件的光学平面表面。
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公开(公告)号：US06552855B1
公开(公告)日：2003-04-22
申请号：US10184280
申请日：2002-06-27
IPC分类号： G02B2710
CPC分类号： H04N9/3123 , H04N9/3105 , H04N9/3188
摘要： An image-forming system with enhanced gray levels, including: a primary beam of light having a primary intensity value; a secondary beam of light having a secondary intensity value significantly less than the primary intensity value; a first modulator array of discrete devices receiving the primary beam of light and producing an output with coarse gray levels; a second modulator array of discrete devices receiving the secondary beam of light and producing an output with fine gray levels; a controller for synchronously controlling the first and the second modulator array; and optics that combine the output with fine gray levels and the output with coarse gray levels to form an image with the enhanced gray levels.
摘要翻译： 一种具有增强灰度级的图像形成系统，包括：具有初级强度值的主光束; 具有明显小于初级强度值的次级强度值的次级光束; 接收主光束并产生具有粗灰度级的输出的分立器件的第一调制器阵列; 接收次级光束并产生具有精细灰度级的输出的分立器件的第二调制器阵列; 控制器，用于同步地控制第一和第二调制器阵列; 以及将输出与精细灰度级别结合的输出和具有粗灰度级的输出以形成具有增强的灰度级的图像的光学器件。
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9.发明授权Method for damping ribbon elements in a micromechanical grating device by selection of actuation waveform 失效通过选择致动波形来阻止微机械光栅装置中的带状元件的方法公开(公告)号：US06282012B1
公开(公告)日：2001-08-28
申请号：US09459301
申请日：1999-12-10
IPC分类号： G02B2600
CPC分类号： G02B26/0808 , G02B5/1828
摘要： A method for damping electro-mechanical ribbon elements over a channel defining a bottom surface and having a bottom conductive layer formed below the bottom surface includes the steps of: providing at least one constant amplitude voltage pulse to at least one ribbon element wherein the actuation pulse causes the ribbon element to contact the bottom surface of the channel; and providing at least one braking pulse to the ribbon elements wherein the braking pulse is separated by a narrow temporal gap from the constant amplitude voltage pulse. Furthermore, the method can also provide a sophisticated damping for ribbon elements which are actuated so that they do not contact the bottom of the channel.
摘要翻译： 一种用于在限定底表面并且具有形成在底表面下方的底部导电层的通道上阻尼电 - 机械带状元件的方法包括以下步骤：向至少一个带状元件提供至少一个恒定幅度的电压脉冲，其中致动脉冲 使得带状元件接触通道的底表面; 以及向所述带状元件提供至少一个制动脉冲，其中所述制动脉冲与所述恒定幅度电压脉冲相隔一窄的时间间隔。 此外，该方法还可以为致动的带状元件提供复杂的阻尼，使得它们不接触通道的底部。
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公开(公告)号：US06567217B1
公开(公告)日：2003-05-20
申请号：US09993034
申请日：2001-11-06
IPC分类号： G02B2710
CPC分类号： H04N9/3123 , H04N9/3105 , H04N9/3188
摘要： An image-forming system with enhanced gray levels, including: a primary beam of light having a primary intensity value, a secondary beam of light having a secondary intensity value significantly less than the primary intensity value; a first modulator array of discrete devices receiving the primary beam of light and producing an output with coarse gray levels, a second modulator array of discrete devices receiving the secondary beam of light and producing an output with fine gray levels; a controller for synchronously controlling the first and the second modulator array; and optics that combine the output with fine gray levels and the output with coarse gray levels to form an image with the enhanced gray levels.
摘要翻译： 一种具有增强的灰度级的图像形成系统，包括：具有初级强度值的主光束，具有明显小于初始强度值的次级强度值的次级光束; 接收主光束并产生具有粗灰度级的输出的分立器件的第一调制器阵列，接收次级光束并产生具有精细灰度级的输出的分立器件的第二调制器阵列; 控制器，用于同步地控制第一和第二调制器阵列; 以及将输出与精细灰度级别结合的输出和具有粗灰度级的输出以形成具有增强的灰度级的图像的光学器件。
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