公开(公告)号：US11841534B1

公开(公告)日：2023-12-12

申请号：US17831065

申请日：2022-06-02

Applicant: GlobalFoundries U.S. Inc.

Inventor： Adam Rosenfeld ,  Yusheng Bian ,  Francis Afzal ,  Bob Mulfinger

IPC: G02B6/122 ,  G02B6/124 ,  G02B6/13 ,  G02B6/12

CPC classification number: G02B6/124 ,  G02B6/1223 ,  G02B6/13 ,  G02B2006/12061 ,  G02B2006/12107

Abstract: Structures including a waveguide core and methods of fabricating a structure including a waveguide core. The structure comprises a substrate, a waveguide core, and a grating disposed in a vertical direction between the waveguide core and the substrate. The grating includes a first plurality of layers and a second plurality of layers that alternate in the vertical direction with the first plurality of layers. The first plurality of layers comprise a first material having a first refractive index, and the second plurality of layers comprise a second material having a second refractive index that is greater than the first refractive index.

公开(公告)号：US20230393334A1

公开(公告)日：2023-12-07

申请号：US17831065

申请日：2022-06-02

Applicant: GlobalFoundries U.S. Inc.

Inventor： Adam Rosenfeld ,  Yusheng Bian ,  Francis Afzal ,  Bob Mulfinger

IPC: G02B6/124 ,  G02B6/13

CPC classification number: G02B6/124 ,  G02B6/13 ,  G02B2006/12107

Abstract: Structures including a waveguide core and methods of fabricating a structure including a waveguide core. The structure comprises a substrate, a waveguide core, and a grating disposed in a vertical direction between the waveguide core and the substrate. The grating includes a first plurality of layers and a second plurality of layers that alternate in the vertical direction with the first plurality of layers. The first plurality of layers comprise a first material having a first refractive index, and the second plurality of layers comprise a second material having a second refractive index that is greater than the first refractive index.