公开(公告)号：US20240419047A1

公开(公告)日：2024-12-19

申请号：US18210151

申请日：2023-06-15

Applicant: GlobalFoundries U.S. Inc.

Inventor： Michal Rakowski ,  Sujith Chandran ,  Takako Hirokawa ,  Pilar Gonzalez

IPC: G02F1/225 ,  G02F1/01 ,  G02F1/21

Abstract: Structures for a broadband optical switch and methods of forming such structures. The structure comprises a Mach-Zehnder interferometer including first and second arms. The first arm comprises a first waveguide core, and the second arm comprises a second waveguide core. The structure further comprises a ring resonator comprising a third waveguide core that has a first thickness. A portion of the third waveguide core is adjacent to a portion of the first waveguide core over a light coupling region. A slab layer connects the portion of the first waveguide core to the portion of the third waveguide core. The slab layer has a second thickness that is less than the first thickness of the first waveguide core.