公开(公告)号：US20060104320A1

公开(公告)日：2006-05-18

申请号：US11274273

申请日：2005-11-16

申请人： Goichi Ohmae ,  Hiroshi Aoyama

发明人： Goichi Ohmae ,  Hiroshi Aoyama

IPC分类号： H01S3/10

CPC分类号： G02F1/37 ,  B23K26/064 ,  B23K26/0673

摘要： The invention provides a method and an apparatus for forming a plurality of ultraviolet-wavelength laser beams, and a laser machining apparatus, in which the machining efficiency can be improved due to easy maintenance and inspection while deterioration of wavelength conversion means can be prevented to reduce the running cost. A laser beam with a near infrared wavelength output from a laser oscillator is branched into a plurality of laser beams by a laser distribution unit. Each branched laser beam is partially converted into a laser beam whose wavelength is ½ of the near infrared wavelength by a wavelength converter. An ultraviolet laser beam whose wavelength is ⅓ of the near infrared wavelength of the laser beam is formed out of the branched laser beam and the laser beam with the wavelength which is ½ of the near infrared wavelength by another wavelength converter, both the branched laser beam and the laser beam with the wavelength which is ½ of the near infrared wavelength being output from the wavelength converter. The ultraviolet laser beam is extracted and supplied to a portion to be machined, by a wavelength separator.

摘要翻译： 本发明提供一种用于形成多个紫外波长激光束的方法和装置，以及激光加工装置，其中由于易于维护和检查而可以提高加工效率，同时可以防止波长转换装置的劣化降低 运行成本。 从激光振荡器输出的具有近红外波长的激光束通过激光分配单元分支成多个激光束。 每个分支的激光束被波长转换器部分地转换成其波长为近红外波长的1/2的激光束。 波长为激光束的近红外波长的1/3的紫外激光束由分支激光束和波长为近红外波长的1/2的激光束由另一波长转换器形成， 激光束和波长为近红外波长1/2的波长的激光束从波长转换器输出。 通过波长分离器将紫外线激光束提取并供给到待加工的部分。

公开(公告)号：US20080237204A1

公开(公告)日：2008-10-02

申请号：US12031232

申请日：2008-02-14

申请人： Goichi Ohmae ,  Hiroshi Aoyama ,  Masayuki Shiga ,  Shigenobu Maruyama

发明人： Goichi Ohmae ,  Hiroshi Aoyama ,  Masayuki Shiga ,  Shigenobu Maruyama

IPC分类号： B23K26/38

CPC分类号： H05K3/0026 ,  B23K26/066 ,  B23K26/0732 ,  B23K26/361 ,  B23K2101/42 ,  H05K2203/0557

摘要： A laser beam machining method for a printed circuit board, for enabling to bring the depth of a bottom surface of grooves within an overlap region, which is irradiated with a laser beam, repetitively, to be nearly equal to that of the bottom surface of grooves within other regions, comprises the following steps of: fixing a line beam 4, which is shaped into a rectangular having a length sufficiently larger than its width, in a cross-section perpendicular to a central axis thereof; executing a belt-like machining on a certain region of the printed circuit board 6, while moving a mask 1 and the printed circuit board 6 in opposite directions, in a direction of the width of the line beam 4 (i.e., X-direction); and thereafter moving the mask 1 and the printed circuit board 6, relatively, into a direction perpendicular to the belt-like machining direction, and repeating the belt-like machining upon other region, newly, thereby machining a groove on the printed circuit board 6, wherein when repeating the machining overlapping the regions, the machining is conducted with using the line beam 4 being shaped to be oblique on its overlapping side, to be overlapped on that region.

摘要翻译： 一种用于印刷电路板的激光束加工方法，其能够使被激光束照射的重叠区域内的凹槽的底面的深度重复地与槽的底面的深度相等 在其他区域内，包括以下步骤：在垂直于其中心轴线的横截面中固定成形为具有足够大于其宽度的长度的矩形的线束4; 在沿着线束4的宽度方向（即X方向）移动掩模1和印刷电路板6的相反方向上，在印刷电路板6的某个区域上执行带状加工， ; 然后将掩模1和印刷电路板6相对地移动到垂直于带状加工方向的方向上，并且重新进行其他区域的带状加工，从而在印刷电路板6上加工凹槽 其中，当重复所述加工与所述区域重叠时，使用在其重叠侧成形为倾斜的线束4进行加工，以在该区域上重叠。

公开(公告)号：US20080232421A1

公开(公告)日：2008-09-25

申请号：US12111224

申请日：2008-04-29

申请人： Goichi Ohmae ,  Hiroshi Aoyama

发明人： Goichi Ohmae ,  Hiroshi Aoyama

IPC分类号： H01S3/08

CPC分类号： G02F1/37 ,  B23K26/064 ,  B23K26/0673

摘要： The invention provides a method and an apparatus for forming a plurality of ultraviolet-wavelength laser beams, and a laser machining apparatus, in which the machining efficiency can be improved due to easy maintenance and inspection while deterioration of wavelength conversion means can be prevented to reduce the running cost. A laser beam with a near infrared wavelength output from a laser oscillator is branched into a plurality of laser beams by a laser distribution unit. Each branched laser beam is partially converted into a laser beam whose wavelength is ½ of the near infrared wavelength by a wavelength converter. An ultraviolet laser beam whose wavelength is ⅓ of the near infrared wavelength of the laser beam is formed out of the branched laser beam and the laser beam with the wavelength which is ½ of the near infrared wavelength by another wavelength converter, both the branched laser beam and the laser beam with the wavelength which is ½ of the near infrared wavelength being output from the wavelength converter. The ultraviolet laser beam is extracted and supplied to a portion to be machined, by a wavelength separator.

摘要翻译： 本发明提供一种用于形成多个紫外波长激光束的方法和装置，以及激光加工装置，其中由于易于维护和检查而可以提高加工效率，同时可以防止波长转换装置的劣化降低 运行成本。 从激光振荡器输出的具有近红外波长的激光束通过激光分配单元分支成多个激光束。 每个分支的激光束被波长转换器部分地转换成其波长为近红外波长的1/2的激光束。 波长为激光束的近红外波长的1/3的紫外激光束由分支激光束和波长为近红外波长的1/2的激光束由另一波长转换器形成， 激光束和波长为近红外波长1/2的波长的激光束从波长转换器输出。 通过波长分离器将紫外线激光束提取并供给到待加工的部分。

公开(公告)号：US20080223839A1

公开(公告)日：2008-09-18

申请号：US12033932

申请日：2008-02-20

申请人： Shigenobu Maruyama ,  Hiroshi Aoyama ,  Masayuki Shiga ,  Goichi Ohmae

发明人： Shigenobu Maruyama ,  Hiroshi Aoyama ,  Masayuki Shiga ,  Goichi Ohmae

IPC分类号： B23K26/02

CPC分类号： B23K26/043 ,  B23K26/03 ,  B23K26/032 ,  B23K26/04 ,  B23K26/042 ,  B23K26/066 ,  B23K26/0738 ,  B23K26/0861 ,  B23K2101/40 ,  B23K2101/42

摘要： A laser machining apparatus capable of accurately projecting mask patterns onto a work piece and superior in machining accuracy. An auto-focusing unit is provided. The auto-focusing unit includes a television camera for observing alignment marks formed on the surface of the work piece so as to be able to measure the focal length of a projection lens. A main-scanning direction expansion/contraction ratio Ex of the work piece to its design value and a sub-scanning direction expansion/contraction ratio Ey of the work piece to its design value are obtained. The imaging magnification M of the projection lens is corrected to compensate the expansion/contraction ratio Ex. The moving speed of a mask and/or the moving speed of the work piece are corrected in consideration of the imaging magnification M of the projection lens so as to compensate the expansion/contraction ratio Ey.

摘要翻译： 一种激光加工装置，其能够将掩模图案精确地投影到工件上，并且加工精度优异。 提供自动对焦单元。 自动对焦单元包括用于观察形成在工件表面上的对准标记以便能够测量投影透镜的焦距的电视摄像机。 将工件的主扫描方向伸缩比Ex与其设计值和工件的副扫描方向扩大/缩小比Ey相对应的设计值。 校正投影透镜的成像倍率M以补偿膨胀/收缩比Ex。 考虑到投影透镜的成像倍率M来校正工件的移动速度和/或工件的移动速度，以补偿膨胀/收缩比Ey。