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公开(公告)号：US20100313312A1
公开(公告)日：2010-12-09
申请号：US12279779
申请日：2007-02-20
申请人： Gregory Dahlen , Hao-chih Liu
发明人： Gregory Dahlen , Hao-chih Liu
摘要： A method and apparatus are provided of characterizing a re-entrant SPM probe tip (30) through a single scan of a characterizer, thus dramatically increasing throughput, accuracy, and repeatability when compared to prior known tip characterization techniques. The characterizer also preferably is one whose dimensions can be known with a high level of certainty in order to maximize characterization accuracy. These dimensions are also preferably very stable or, if unstable, change catastrophically rather than in a manner that is difficult or impossible to detect. A carbon nanotube (CNT), preferably a single walled carbon nanotube (SWCNT), has been found to be well-suited for this purpose. Multi-walled carbon nanotubes (MWCNTs) (130) and other structures may also suffice for this purpose. Also provided are a method and apparatus for monitoring the integrity of a CNT.
摘要翻译： 提供了通过单个扫描表征器来表征入侵者SPM探针尖端（30）的方法和装置，因此当与现有已知的尖端表征技术相比时，显着增加了吞吐量，精度和可重复性。 表征器还优选的是其尺寸可以以高水平的确定性被知道，以便最大化表征精度。 这些尺寸也优选非常稳定，或者如果不稳定，则会以难以或不可能检测的方式发生灾难性的变化。 已经发现碳纳米管（CNT），优选单壁碳纳米管（SWCNT）是非常适合于此目的的。 多层碳纳米管（MWCNT）（130）和其他结构也足以达到此目的。 还提供了用于监测CNT的完整性的方法和装置。
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公开(公告)号：US08650661B2
公开(公告)日：2014-02-11
申请号：US12279779
申请日：2007-02-20
申请人： Gregory A. Dahlen , Hao-chih Liu
发明人： Gregory A. Dahlen , Hao-chih Liu
IPC分类号： G01Q70/10
摘要： A method and apparatus are provided of characterizing a re-entrant SPM probe tip (30) through a single scan of a characterizer, thus dramatically increasing throughput, accuracy, and repeatability when compared to prior known tip characterization techniques. The characterizer also preferably is one whose dimensions can be known with a high level of certainty in order to maximize characterization accuracy. These dimensions are also preferably very stable or, if unstable, change catastrophically rather than in a manner that is difficult or impossible to detect. A carbon nanotube (CNT), preferably a single walled carbon nanotube (SWCNT), has been found to be well-suited for this purpose. Multi-walled carbon nanotubes (MWCNTs) (130) and other structures may also suffice for this purpose. Also provided are a method and apparatus for monitoring the integrity of a CNT.
摘要翻译： 提供了通过单个扫描表征器来表征入侵者SPM探针尖端（30）的方法和装置，因此当与现有已知的尖端表征技术相比时，显着增加了吞吐量，精度和可重复性。 表征器还优选的是其尺寸可以以高水平的确定性被知道，以便最大化表征精度。 这些尺寸也优选非常稳定，或者如果不稳定，则会以难以或不可能检测的方式发生灾难性的变化。 已经发现碳纳米管（CNT），优选单壁碳纳米管（SWCNT）是非常适合于此目的的。 多层碳纳米管（MWCNT）（130）和其他结构也足以达到此目的。 还提供了用于监测CNT的完整性的方法和装置。
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