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1.发明申请公开(公告)号：US20100005553A1
公开(公告)日：2010-01-07
申请号：US12375161
申请日：2007-07-27
申请人： Sungho Jin , Li-Hen Chen , Gregory Dahlen , Hao-Chih Liu
发明人： Sungho Jin , Li-Hen Chen , Gregory Dahlen , Hao-Chih Liu
摘要： Sidewall tracing nanoprobes, in which the tip shape of the nanoprobe Is altered so that the diameter or width of the very tip of the probe is wider than the diameter of the supporting stem. Such side protruding probe tips are fabricated by a subtractive method of reducing the stem diameter, an additive method of increasing the tip diameter, or sideway bending of the probe tip. These sidewall tracing nanoprobes are useful for inspection of semiconductor devices, especially to quantitatively evaluate the defects on the side wall of trenches or via holes.
摘要翻译： 侧壁跟踪纳米探针，其中纳米探针的尖端形状被改变，使得探针的尖端的直径或宽度比支撑杆的直径宽。 这种侧突出的探针尖端通过减小茎直径的减法方法，增加尖端直径的添加方法或探针尖端的侧向弯曲来制造。 这些侧壁跟踪纳米探针可用于检查半导体器件，特别是定量评估沟槽或通孔侧壁上的缺陷。
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公开(公告)号：US20070208533A1
公开(公告)日：2007-09-06
申请号：US11605175
申请日：2006-11-28
申请人： Gregory Dahlen , William Foreman
发明人： Gregory Dahlen , William Foreman
IPC分类号： G01B15/04
摘要： A method of extracting the shape of a probe tip of a probe-based instrument from data obtained by the instrument is provided. The method employs algorithms based on the principle that no reconstructed image points can physically occupy the same region as the tip during imaging. Sequential translates of the tip shape or volume sweep out an area or volume that is an “exclusion zone” similar to morphological erosion. The embodiments of the alternative method use either the region defined by the tip boundary or simply the tip boundary.
摘要翻译： 提供了一种从由仪器获得的数据中提取基于探针的仪器的探针尖端的形状的方法。 该方法采用基于以下原理的算法：在成像期间，重建图像点在物理上不会与尖端物理占据相同的区域。 尖端形状或体积的顺序平移扫出与形态侵蚀类似的“排除区”的区域或体积。 替代方法的实施例使用由尖端边界或简单的尖端边界限定的区域。
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3.发明授权公开(公告)号：US08245318B2
公开(公告)日：2012-08-14
申请号：US12375161
申请日：2007-07-27
申请人： Sungho Jin , Li-Han Chen , Gregory Dahlen , Hao-Chih Liu
发明人： Sungho Jin , Li-Han Chen , Gregory Dahlen , Hao-Chih Liu
IPC分类号： G01Q70/12
摘要： Sidewall tracing nanoprobes, in which the tip shape of the nanoprobe Is altered so that the diameter or width of the very tip of the probe is wider than the diameter of the supporting stem. Such side protruding probe tips are fabricated by a subtractive method of reducing the stem diameter, an additive method of increasing the tip diameter, or sideway bending of the probe tip. These sidewall tracing nanoprobes are useful for inspection of semiconductor devices, especially to quantitatively evaluate the defects on the side wall of trenches or via holes.
摘要翻译： 侧壁跟踪纳米探针，其中纳米探针的尖端形状被改变，使得探针的尖端的直径或宽度比支撑杆的直径宽。 这种侧突出的探针尖端通过减小茎直径的减法方法，增加尖端直径的添加方法或探针尖端的侧向弯曲来制造。 这些侧壁跟踪纳米探针可用于检查半导体器件，特别是定量评估沟槽或通孔侧壁上的缺陷。
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公开(公告)号：US20100313312A1
公开(公告)日：2010-12-09
申请号：US12279779
申请日：2007-02-20
申请人： Gregory Dahlen , Hao-chih Liu
发明人： Gregory Dahlen , Hao-chih Liu
摘要： A method and apparatus are provided of characterizing a re-entrant SPM probe tip (30) through a single scan of a characterizer, thus dramatically increasing throughput, accuracy, and repeatability when compared to prior known tip characterization techniques. The characterizer also preferably is one whose dimensions can be known with a high level of certainty in order to maximize characterization accuracy. These dimensions are also preferably very stable or, if unstable, change catastrophically rather than in a manner that is difficult or impossible to detect. A carbon nanotube (CNT), preferably a single walled carbon nanotube (SWCNT), has been found to be well-suited for this purpose. Multi-walled carbon nanotubes (MWCNTs) (130) and other structures may also suffice for this purpose. Also provided are a method and apparatus for monitoring the integrity of a CNT.
摘要翻译： 提供了通过单个扫描表征器来表征入侵者SPM探针尖端（30）的方法和装置，因此当与现有已知的尖端表征技术相比时，显着增加了吞吐量，精度和可重复性。 表征器还优选的是其尺寸可以以高水平的确定性被知道，以便最大化表征精度。 这些尺寸也优选非常稳定，或者如果不稳定，则会以难以或不可能检测的方式发生灾难性的变化。 已经发现碳纳米管（CNT），优选单壁碳纳米管（SWCNT）是非常适合于此目的的。 多层碳纳米管（MWCNT）（130）和其他结构也足以达到此目的。 还提供了用于监测CNT的完整性的方法和装置。
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公开(公告)号：US20050043917A1
公开(公告)日：2005-02-24
申请号：US10944333
申请日：2004-09-17
申请人： Gregory Dahlen , William Foreman
发明人： Gregory Dahlen , William Foreman
摘要： A method of extracting the shape of a probe tip of a probe-based instrument from data obtained by the instrument is provided. The method employs algorithms based on the principle that no reconstructed image points can physically occupy the same region as the tip during imaging. Sequential translates of the tip shape or volume sweep out an area or volume that is an “exclusion zone” similar to morphological erosion. The embodiments of the alternative method use either the region defined by the tip boundary or simply the tip boundary.
摘要翻译： 提供了一种从由仪器获得的数据中提取基于探针的仪器的探针尖端的形状的方法。 该方法采用基于以下原理的算法：在成像期间，重建图像点在物理上不会与尖端物理占据相同的区域。 尖端形状或体积的顺序平移扫出与形态侵蚀类似的“排除区”的区域或体积。 替代方法的实施例使用由尖端边界或简单的尖端边界限定的区域。
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