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    All-reflective optical systems for broadband wafer inspection
    2.
    发明申请
    All-reflective optical systems for broadband wafer inspection 有权
    用于宽带晶圆检测的全反射光学系统

    公开(公告)号：US20060219930A1

    公开(公告)日：2006-10-05

    申请号：US11097526

    申请日：2005-03-31

    申请人： Steven Lange

    发明人： Steven Lange

    IPC分类号： G01N21/88

    CPC分类号： G02B17/061 ,  G01N21/9501 ,  G01N2021/9563 ,  G01N2201/0636

    摘要： All-reflective optical systems for broadband wafer inspection are provided. One system configured to inspect a wafer includes an optical subsystem. All light-directing components of the optical subsystem are reflective optical components except for one or more refractive optical components, which are located only in substantially collimated space. The refractive optical component(s) may include, for example, a refractive beamsplitter element that can be used to separate illumination and collection pupils. The optical subsystem may also include one or more reflective optical components located in substantially collimated space. The optical subsystem is configured for inspection of the wafer across a waveband of greater than 20 nm. In some embodiments, the optical subsystem is configured for inspection of the wafer at wavelengths less than and greater than 200 nm.

    摘要翻译： 提供了用于宽带晶圆检测的全反射光学系统。 配置为检查晶片的一个系统包括光学子系统。 光学子系统的所有光指向部件都是反射光学部件，除了一个或多个折射光学部件，其仅位于基本准直的空间中。 折射光学部件可以包括例如可用于分离照明和收集瞳孔的折射分束器元件。 光学子系统还可以包括位于基本上准直的空间中的一个或多个反射光学部件。 光学子系统被配置用于跨越超过20nm的波段检查晶片。 在一些实施例中，光学子系统被配置为在小于或大于200nm的波长下检查晶片。

    Radiation damage reduction
    3.
    发明申请
    Radiation damage reduction 有权
    辐射损伤减少

    公开(公告)号：US20050048678A1

    公开(公告)日：2005-03-03

    申请号：US10654082

    申请日：2003-09-03

    申请人： Steven Lange

    发明人： Steven Lange

    IPC分类号： G01N21/84 ,  G03F7/20 ,  H01L21/00

    CPC分类号： G03F7/70533 ,  G03F7/70541

    摘要： A method for limiting exposure of a substrate to potentially damaging radiation from a radiating apparatus. A database of information associated with the substrate is compiled, and the substrate is identified prior to processing the substrate on the radiating apparatus. The database of information associated with the substrate is accessed, including its past irradiation history of dosage and type of irradiation, based on the substrate identification, and the operation of the radiating apparatus is selectively modified based at least in part on the information associated with the substrate.

    摘要翻译： 一种用于限制衬底暴露于来自辐射装置的潜在有害辐射的方法。 编辑与衬底相关联的信息的数据库，并且在辐射装置上处理衬底之前识别衬底。 基于衬底识别，访问与衬底相关联的信息的数据库，包括其过去的剂量和照射类型的照射历史，并且至少部分地基于与所述衬底识别相关联的信息来选择性地修改辐射装置的操作 基质。

    Sealing acoustical baffle and method therefor
    5.
    发明授权
    Sealing acoustical baffle and method therefor 失效
    密封声挡板及其方法

    公开(公告)号：US6062624A

    公开(公告)日：2000-05-16

    申请号：US63717

    申请日：1998-04-21

    申请人： Joseph H. Crabtree ,  Steven Lange

    发明人： Joseph H. Crabtree ,  Steven Lange

    IPC分类号： B29C44/18 ,  B62D29/00 ,  B62D33/00

    CPC分类号： B29C44/18 ,  B62D29/002

    摘要： This is a sealing material for filling a cavity of a pillar or another body member of an automobile. The material is a sealing acoustical baffle of a sandwich of foil faced paper board with an expandable sealant between the boards. The baffles force the sealer to flow out horizontally from the boards to totally seal all corners of the cavity. The in-line manufacturing of extruded laminated material allows in-line die cutting with quick change dies and/or water jet cutting. Acoustical value is very high due to the barrier affect of the foil kraft board. If the cavity size changes as they often do during pilot, prototype and production, the only tooling charge is a simple steel rule die or modified water jet program.

    摘要翻译： 这是用于填充汽车的立柱或另一主体部件的空腔的密封材料。 该材料是箔板的三明治密封隔音板，在板之间具有可膨胀的密封剂。 挡板迫使密封剂从板水平流出以完全密封空腔的所有角。 挤出层压材料的在线制造允许使用快速换模和/或水射流切割进行在线模切。 由于箔片牛皮纸板的屏障影响，声值非常高。 如果腔体尺寸在飞行员，原型和生产过程中经常发生变化，则唯一的加工费用是简单的钢制模具或改性喷水程序。