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公开(公告)号：US07848599B2
公开(公告)日：2010-12-07
申请号：US12415858
申请日：2009-03-31
CPC分类号： G02F1/025 , G02F1/0147 , G02F1/3133 , H01L2224/48091 , H01L2224/48472 , Y10T29/49124 , H01L2924/00014
摘要： Embodiments of an optical device, an array of optical devices, and a technique for fabricating the optical device or the array are described. This optical device is implemented on a substrate (such as silicon), and includes a thermally tunable optical waveguide that has good thermal isolation from its surroundings. In particular, a portion of a semiconductor in the optical device, which includes the optical waveguide, is free standing above a gap between the semiconductor layer and the substrate. By reducing the thermal coupling between the optical waveguide and the external environment, the optical device can be thermally tuned with significantly less power consumption.
摘要翻译： 描述了光学器件，光学器件阵列以及用于制造光学器件或阵列的技术的实施例。 该光学器件实现在基板（例如硅）上，并且包括具有与其周围环境良好热隔离的热可调谐光波导。 特别地，包括光波导的光学器件中的半导体的一部分自由地位于半导体层和衬底之间的间隙之上。 通过减少光波导和外部环境之间的热耦合，可以以显着更少的功耗来热调谐光学器件。
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公开(公告)号：US20100247021A1
公开(公告)日：2010-09-30
申请号：US12415858
申请日：2009-03-31
CPC分类号： G02F1/025 , G02F1/0147 , G02F1/3133 , H01L2224/48091 , H01L2224/48472 , Y10T29/49124 , H01L2924/00014
摘要： Embodiments of an optical device, an array of optical devices, and a technique for fabricating the optical device or the array are described. This optical device is implemented on a substrate (such as silicon), and includes a thermally tunable optical waveguide that has good thermal isolation from its surroundings. In particular, a portion of a semiconductor in the optical device, which includes the optical waveguide, is free standing above a gap between the semiconductor layer and the substrate. By reducing the thermal coupling between the optical waveguide and the external environment, the optical device can be thermally tuned with significantly less power consumption.
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公开(公告)号：US20100247029A1
公开(公告)日：2010-09-30
申请号：US12415882
申请日：2009-03-31
IPC分类号： G02B6/12
CPC分类号： G02B6/12007 , G02B2006/12061 , G02F1/011 , G02F1/0147 , G02F2202/10
摘要： Embodiments of an optical device, an array of optical devices, and a technique for fabricating the optical device or the array are described. This optical device is implemented on a substrate (such as silicon), and includes a thermally tunable optical waveguide with a high thermal resistance to the surrounding external environment and a low thermal resistance to a localized heater. In particular, the thermal resistances associated with thermal dissipation paths from a heater in the optical device to an external environment via electrodes and via the substrate are increased, while the thermal resistance between the optical waveguide and the heater is decreased.
摘要翻译： 描述了光学器件，光学器件阵列以及用于制造光学器件或阵列的技术的实施例。 该光学器件实现在基板（例如硅）上，并且包括具有对周围外部环境的高耐热性和对局部加热器的低热阻的热可调谐光波导。 特别地，与通过电极和经由基板的从光学装置中的加热器到外部环境的热耗散路径相关联的热阻增加，同时光波导和加热器之间的热阻降低。
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公开(公告)号：US08971674B2
公开(公告)日：2015-03-03
申请号：US12730774
申请日：2010-03-24
CPC分类号： G02B6/12007 , G02F1/0147 , G02F1/025 , G02F1/3132
摘要： An optical device with high thermal tuning efficiency is described. This optical device may be implemented using a tri-layer structure (silicon-on-insulator technology), including: a substrate, a buried-oxide layer and a semiconductor layer. In particular, a thermally tunable optical waveguide may be defined in the semiconductor layer. Furthermore, a portion of the substrate under the buried-oxide layer and substantially beneath a location of the thermally tunable optical waveguide is fabricated so that a portion of the buried-oxide layer is exposed. In this way, the thermal impedance between the thermally tunable optical waveguide and an external environment is increased, and power consumption associated with thermal tuning of the optical waveguide is reduced.
摘要翻译： 描述了具有高热调谐效率的光学装置。 该光学器件可以使用三层结构（绝缘体上硅技术）来实现，包括：衬底，掩埋氧化物层和半导体层。 特别地，热可调谐光波导可以限定在半导体层中。 此外，制造掩埋氧化物层下面的基板的一部分并且基本上位于热可调谐光波导的位置下方，使得一部分掩埋氧化物层露出。 以这种方式，热可调谐光波导和外部环境之间的热阻抗增加，并且降低与光波导的热调谐相关的功耗。
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公开(公告)号：US20110235962A1
公开(公告)日：2011-09-29
申请号：US12730774
申请日：2010-03-24
CPC分类号： G02B6/12007 , G02F1/0147 , G02F1/025 , G02F1/3132
摘要： An optical device with high thermal tuning efficiency is described. This optical device may be implemented using a tri-layer structure (silicon-on-insulator technology), including: a substrate, a buried-oxide layer and a semiconductor layer. In particular, a thermally tunable optical waveguide may be defined in the semiconductor layer. Furthermore, a portion of the substrate under the buried-oxide layer and substantially beneath a location of the thermally tunable optical waveguide is fabricated so that a portion of the buried-oxide layer is exposed. In this way, the thermal impedance between the thermally tunable optical waveguide and an external environment is increased, and power consumption associated with thermal tuning of the optical waveguide is reduced.
摘要翻译： 描述了具有高热调谐效率的光学装置。 该光学器件可以使用三层结构（绝缘体上硅技术）来实现，包括：衬底，掩埋氧化物层和半导体层。 特别地，热可调谐光波导可以限定在半导体层中。 此外，制造掩埋氧化物层下面的基板的一部分并且基本上位于热可调谐光波导的位置下方，使得一部分掩埋氧化物层露出。 以这种方式，热可调谐光波导和外部环境之间的热阻抗增加，并且降低与光波导的热调谐相关的功耗。
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公开(公告)号：US20100247022A1
公开(公告)日：2010-09-30
申请号：US12415886
申请日：2009-03-31
CPC分类号： G02B6/12007 , G02F1/0147 , G02F1/025 , G02F2203/15
摘要： Embodiments of an optical device, an array of optical devices, and a technique for fabricating the optical device or the array are described. This optical device is implemented using two semiconductor layers (such as silicon), one of which includes a heater and the other includes a thermally tunable optical waveguide. Spatially separating these two functions in the optical device results in more efficient heat transfer between the heater and the optical waveguide, reduced heat transfer to the surroundings, and reduced optical losses in the optical waveguide relative to existing silicon-based optical devices.
摘要翻译： 描述了光学器件，光学器件阵列以及用于制造光学器件或阵列的技术的实施例。 该光学器件使用两个半导体层（诸如硅）来实现，其中一个包括加热器，另一个包括热可调谐光波导。 在光学器件中空间分离这两个功能导致加热器和光波导之间的更有效的热传递，减少的热传递到周围环境，并且相对于现有的硅基光学器件减少了光波导中的光学损耗。
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公开(公告)号：US08150223B2
公开(公告)日：2012-04-03
申请号：US12415882
申请日：2009-03-31
IPC分类号： G02B6/26
CPC分类号： G02B6/12007 , G02B2006/12061 , G02F1/011 , G02F1/0147 , G02F2202/10
摘要： Embodiments of an optical device, an array of optical devices, and a technique for fabricating the optical device or the array are described. This optical device is implemented on a substrate (such as silicon), and includes a thermally tunable optical waveguide with a high thermal resistance to the surrounding external environment and a low thermal resistance to a localized heater. In particular, the thermal resistances associated with thermal dissipation paths from a heater in the optical device to an external environment via electrodes and via the substrate are increased, while the thermal resistance between the optical waveguide and the heater is decreased.
摘要翻译： 描述了光学器件，光学器件阵列以及用于制造光学器件或阵列的技术的实施例。 该光学器件实现在基板（例如硅）上，并且包括具有对周围外部环境的高耐热性和对局部加热器的低热阻的热可调谐光波导。 特别地，与通过电极和经由基板的从光学装置中的加热器到外部环境的热耗散路径相关联的热阻增加，同时光波导和加热器之间的热阻降低。
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公开(公告)号：US08131119B2
公开(公告)日：2012-03-06
申请号：US12845035
申请日：2010-07-28
CPC分类号： G02F1/025 , G02F1/0147 , G02F1/3133 , H01L2224/48091 , H01L2224/48472 , Y10T29/49124 , H01L2924/00014
摘要： Embodiments of an optical device, an array of optical devices, and a technique for fabricating the optical device or the array are described. This optical device is implemented on a substrate (such as silicon), and includes a thermally tunable optical waveguide that has good thermal isolation from its surroundings. In particular, a portion of a semiconductor in the optical device, which includes the optical waveguide, is free standing above a gap between the semiconductor layer and the substrate. By reducing the thermal coupling between the optical waveguide and the external environment, the optical device can be thermally tuned with significantly less power consumption.
摘要翻译： 描述了光学器件，光学器件阵列以及用于制造光学器件或阵列的技术的实施例。 该光学器件实现在基板（例如硅）上，并且包括具有与其周围环境良好热隔离的热可调谐光波导。 特别地，包括光波导的光学器件中的半导体的一部分自由地位于半导体层和衬底之间的间隙之上。 通过减少光波导和外部环境之间的热耦合，可以以显着更少的功耗来热调谐光学器件。
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公开(公告)号：US08078013B2
公开(公告)日：2011-12-13
申请号：US12415886
申请日：2009-03-31
CPC分类号： G02B6/12007 , G02F1/0147 , G02F1/025 , G02F2203/15
摘要： Embodiments of an optical device, an array of optical devices, and a technique for fabricating the optical device or the array are described. This optical device is implemented using two semiconductor layers (such as silicon), one of which includes a heater and the other includes a thermally tunable optical waveguide. Spatially separating these two functions in the optical device results in more efficient heat transfer between the heater and the optical waveguide, reduced heat transfer to the surroundings, and reduced optical losses in the optical waveguide relative to existing silicon-based optical devices.
摘要翻译： 描述了光学器件，光学器件阵列以及用于制造光学器件或阵列的技术的实施例。 该光学器件使用两个半导体层（诸如硅）来实现，其中一个包括加热器，另一个包括热可调谐光波导。 在光学器件中空间分离这两个功能导致加热器和光波导之间的更有效的热传递，减少的热传递到周围环境，并且相对于现有的硅基光学器件减少了光波导中的光学损耗。
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公开(公告)号：US20100290736A1
公开(公告)日：2010-11-18
申请号：US12845035
申请日：2010-07-28
IPC分类号： G02B6/12 , H01L21/306
CPC分类号： G02F1/025 , G02F1/0147 , G02F1/3133 , H01L2224/48091 , H01L2224/48472 , Y10T29/49124 , H01L2924/00014
摘要： Embodiments of an optical device, an array of optical devices, and a technique for fabricating the optical device or the array are described. This optical device is implemented on a substrate (such as silicon), and includes a thermally tunable optical waveguide that has good thermal isolation from its surroundings. In particular, a portion of a semiconductor in the optical device, which includes the optical waveguide, is free standing above a gap between the semiconductor layer and the substrate. By reducing the thermal coupling between the optical waveguide and the external environment, the optical device can be thermally tuned with significantly less power consumption.
摘要翻译： 描述了光学器件，光学器件阵列以及用于制造光学器件或阵列的技术的实施例。 该光学器件实现在基板（例如硅）上，并且包括具有与其周围环境良好热隔离的热可调谐光波导。 特别地，包括光波导的光学器件中的半导体的一部分自由地位于半导体层和衬底之间的间隙之上。 通过减少光波导和外部环境之间的热耦合，可以以显着更少的功耗来热调谐光学器件。
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