SEMICONDUCTOR DEVICE HAVING STACKED TRANSISTORS AND METHOD OF FORMING THE SAME
    1.
    发明申请
    SEMICONDUCTOR DEVICE HAVING STACKED TRANSISTORS AND METHOD OF FORMING THE SAME 有权
    具有堆叠晶体管的半导体器件及其形成方法

    公开(公告)号:US20070181953A1

    公开(公告)日:2007-08-09

    申请号:US11672875

    申请日:2007-02-08

    IPC分类号: H01L29/76

    摘要: A semiconductor device includes a first semiconductor layer, a first interlayer insulation layer, a second semiconductor layer, and a gate pattern. The first interlayer insulation layer covers the first semiconductor layer. The second semiconductor layer is formed on the first interlayer insulation layer and includes source regions, drain regions, and a channel region interposed between the source region and the drain region. The gate pattern includes a gate insulation layer on the channel region of the second semiconductor layer. At least one of the source regions and the drain regions includes an elevated layer having a top surface higher than that of the channel region.

    摘要翻译: 半导体器件包括第一半导体层,第一层间绝缘层,第二半导体层和栅极图案。 第一层间绝缘层覆盖第一半导体层。 第二半导体层形成在第一层间绝缘层上,包括源极区,漏极区和介于源极区和漏极区之间的沟道区。 栅极图案包括在第二半导体层的沟道区上的栅绝缘层。 源极区域和漏极区域中的至少一个包括具有高于沟道区域的顶表面的升高层。