公开(公告)号：US20200080833A1

公开(公告)日：2020-03-12

申请号：US16561059

申请日：2019-09-05

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Toyohiko YAMAUCHI ,  Osamu YASUHIKO ,  Hidenao YAMADA ,  Hisayuki MATSUI

IPC: G01B9/02 ,  G01N21/64

Abstract: A measurement apparatus includes an interference image acquisition unit, a fluorescence image acquisition unit, an operation unit, and a timing control circuit. The operation unit generates an optical thickness image based on an interference image acquired by the interference image acquisition unit, generates a mask image showing a region in which pixel values in a fluorescence image acquired by the fluorescence image acquisition unit are larger than a threshold value, and determines an integrated value of an optical thickness in the region shown by the mask image in the optical thickness image.