公开(公告)号：US11169371B2

公开(公告)日：2021-11-09

申请号：US16692011

申请日：2019-11-22

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Naoto Sakurai ,  Makoto Nozaki

IPC: G02B26/08 ,  G02B26/10

Abstract: A scanning device includes an MEMS mirror mechanism that swings a mirror with respect to a first axial line as a central line and swings the mirror with respect to a second axial line as a central line, and a control unit that generates a first drive signal for swinging the mirror with respect to the first axial line as a central line and a second drive signal for swinging the mirror with respect to the second axial line as a central line. In a lighting-on period in which a light source emits laser light in one swing of the mirror with respect to the second axial line as a central line, the control unit generates the first drive signal and the second drive signal by repeating a process of generating N pieces (N is an integer of two or greater) of second signal elements which respectively constitute the second drive signal with respect to a first signal element in a ½ cycle period in the first drive signal.