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公开(公告)号:US20210024863A1
公开(公告)日:2021-01-28
申请号:US17044592
申请日:2019-04-03
Applicant: HELMHOLTZ-ZENTRUM DRESDEN - ROSSENDORF E.V.
Inventor: Heidemarie SCHMIDT , Ilona SKORUPA , Katarzyna WIESENHÜTTER , Lars REBOHLE
Abstract: A transparent specimen slide on which the range and the magnitude of the near-surface electrostatic forces can be influenced and set during a process of producing the specimen slide. The specimen slide has a surface on the supporting side and a surface facing away from the supporting side and at least three layers: an electrically insulating first layer, a silicon-containing second layer arranged on the first layer, and an electrically insulating third layer arranged on the second layer. An interface is formed between the first and second layers and between the second and third layers with a first surface charge density. The interface between the second and third layers has a second surface charge density. The first and second surface charge densities have the same or different signs.