公开(公告)号：US20210231595A1

公开(公告)日：2021-07-29

申请号：US16981735

申请日：2019-03-19

Applicant: HELMHOLTZ-ZENTRUM DRESDEN - ROSSENDORF E.V.

Inventor： Tobias KOSUB

IPC: G01N27/04 ,  G01R27/28 ,  G01R27/08

Abstract: A method for continuously determining all of the components of the resistance tensor of thin films, such as thin film resistors and thin film sensors of all types, is disclosed. A continuous determination of all the components of the resistance tensor is facilitated without switching the contact points using a minimum number of contacts. A homogeneous thin film part of any shape is provided with a least three contact points arranged at distances from one another. An input voltage is applied at each of the contact points, the current flowing through the contact points are detected, and the complete resistance tensor of the thin film part is determined from the voltage and current values.