公开(公告)号：US20210013356A1

公开(公告)日：2021-01-14

申请号：US16569617

申请日：2019-09-12

Applicant: HEWLETT PACKARD ENTERPRISE DEVELOPMENT LP

Inventor： ZHIHONG HUANG ,  XIAOGE ZENG ,  WAYNE VICTOR SORIN

IPC: H01L31/107 ,  H01L31/02 ,  G02B6/42

Abstract: Resonant cavity photodetector structures which integrate photodetection and filtering capabilities is described. A resonant cavity photodetector structure generally can comprise a region including a resonator, and an absorption region that can be integrated into a cavity of the resonator. The resonator can perform filtering that is suitable for high-bandwidth optical communications, such as Dense Wavelength Multiplexing (DWDM). In some cases, the resonator is a microring resonator. An absorption region can include a photodiode which performs optical energy detection acting as a photodetector, such as an avalanche photodiode (APD) wherein the photodiode. A coupling distance between the resonator region and the absorption region can be controlled, which allows control of a coupling strength between an optical mode of the resonator and the absorption region such that a quality factor (Q-factor) can be tuned. Thus, by adjusting the Q-factor, the resonant cavity photodetector structure can be tuned to achieve a desirable performance.