公开(公告)号：US20210215611A1

公开(公告)日：2021-07-15

申请号：US16076077

申请日：2017-01-31

Applicant: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.

Inventor： Fausto D'APUZZO ,  Aleksandr POLYAKOV ,  Anita ROGACS

IPC: G01N21/65 ,  G01N21/552

Abstract: A surface enhanced infrared absorption stage may include a substrate, a static island extending from the substrate and a movable nano finger extending from the substrate. The static island may have a plasmonically active island cap and a dimension parallel to the substrate of at least one micrometer. The movable nano finger may be aligned with the dimension. The movable nano finger may have a plasmonicaly active finger cap closable to less than or equal to 5 nm of the island cap.