公开(公告)号：US11164720B2

公开(公告)日：2021-11-02

申请号：US16747761

申请日：2020-01-21

Applicant: HITACHI HIGH-TECH CORPORATION

Inventor： Kenji Yasui ,  Mayuka Osaki ,  Makoto Suzuki ,  Hirohiko Kitsuki ,  Toshiyuki Yokosuka ,  Daisuke Bizen ,  Yusuke Abe

IPC: H01J37/28 ,  H01J37/244 ,  H01J37/20 ,  G01N23/2251

Abstract: To measure a depth of a three-dimensional structure, for example, a hole or a groove, formed in a sample without preparing information in advance, an electron microscope detects, among emitted electrons generated by irradiating a sample with a primary electron beam, an emission angle in a predetermined range, the emission angle being formed between an axial direction of the primary electron beam and an emission direction of the emitted electrons, and outputs a detection signal corresponding to the number of the emitted electrons detected. An emission angle distribution of a detection signal is obtained based on a plurality of detection signals, and an opening angle is obtained based on a change point of the emission angle distribution, the opening angle being based on an optical axis direction of the primary electron beam with respect to the bottom portion of the three-dimensional structure.

公开(公告)号：US11211226B2

公开(公告)日：2021-12-28

申请号：US16810969

申请日：2020-03-06

Applicant: Hitachi High-Tech Corporation

Inventor： Toshiyuki Yokosuka ,  Hirohiko Kitsuki ,  Daisuke Bizen ,  Makoto Suzuki ,  Yusuke Abe ,  Kenji Yasui ,  Mayuka Osaki ,  Hideyuki Kazumi

IPC: H01J37/28 ,  H01J37/22 ,  H01J37/244

Abstract: The present disclosure provides a pattern cross-sectional shape estimation system which includes a charged particle ray device which includes a scanning deflector that scans a charged particle beam, a detector that detects charged particles, and an angle discriminator that is disposed in a front stage of the detector and discriminates charged particles to be detected, and an arithmetic device that generates a luminance of an image, and calculates a signal waveform of a designated region on the image using the luminance. The arithmetic device generates angle discrimination images using signal electrons at different detection angles, and estimates a side wall shape of a measurement target pattern.