公开(公告)号：US20150276557A1

公开(公告)日：2015-10-01

申请号：US14671042

申请日：2015-03-27

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Toshio MASUDA ,  Mutsuki KOGA ,  Hideo NISHIKAWA ,  Junichi KOKUMA ,  Nobuyoshi TADA

IPC: G01M99/00

CPC classification number: G01M99/008 ,  G05B23/0243

Abstract: A state monitoring system enabling a sign of abnormality of equipment to be detected is disclosed, which includes: a storage unit to be stored with normal models obtained by analyzing, per series of manipulations, time-series learning data of sensor outputs indicated by respective units of processing equipment when normally finishing processing a raw material through the series of manipulations according to a default sequence; and a processing unit to diagnose a state of the processing equipment on the occasion of processing a specified raw material, upon an input of time-series evaluation data of the sensor output indicated by each of the units of the processing equipment on the occasion of finishing processing the specified raw material through the series of manipulations, on the basis of a comparison between the inputted data and the normal model.

Abstract translation: 公开了一种能够检测设备异常的状态监视系统，其包括：存储单元，用于存储与通过分析每个系列操作获得的正常模型的各单元所指示的传感器输出的时间序列学习数据 的处理设备，当根据默认顺序通过一系列操作正常地处理原料时; 以及处理单元，用于在处理指定的原材料时诊断处理设备的状态，在输入由处理设备的每个单元指示的传感器输出的时间序列评估数据 基于输入数据与正常模型之间的比较，通过一系列操作来处理指定的原材料。