公开(公告)号：US20180066986A1

公开(公告)日：2018-03-08

申请号：US15561190

申请日：2016-03-16

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yutaka KASAI ,  Fujio ONISHI ,  Osamu TASAKI ,  Hidetsugu TANOUE ,  Kazuhiro TANAKA

IPC: G01J1/44 ,  G01N21/66 ,  G01N23/225 ,  G01T1/164 ,  G01T1/20 ,  G01N21/956

CPC classification number: G01J1/44 ,  G01J1/42 ,  G01J2001/444 ,  G01N21/66 ,  G01N21/956 ,  G01N23/203 ,  G01N23/22 ,  G01N23/225 ,  G01T1/1647 ,  G01T1/20 ,  G01T1/208 ,  H01J37/28

Abstract: A signal detected by a photomultiplier tube is pre-amplified and converted into a digital signal. A time average value of signal components, each of which has a voltage lower than a predetermined base threshold value, is calculated as a base voltage. A signal that has been subjected to base correction processing is subjected to threshold value processing and to base correction processing in a non-incident state in which light is not incident on the photomultiplier tube. An output signal thereof is subjected to dark current calculation processing; and a light emission signal amount is calculated by subtracting, from the signal component of the detection light obtained by the threshold value processing, a time average value of the signal components of the dark current. As the result, discriminating the dark current pulse from floor noises enhances the accuracy of the base voltage, and thus the accuracy of light detection.