公开(公告)号：US20030177832A1

公开(公告)日：2003-09-25

申请号：US10384645

申请日：2003-03-11

Applicant: HITACHI METALS, LTD.

Inventor： Hiroyuki Hatano ,  Masakatsu Saitoh ,  Sinji Furuichi

IPC: G01P015/12

CPC classification number: G01P15/123 ,  G01P15/18 ,  G01P2015/084

Abstract: An ultra-small and slim semiconductor acceleration sensor with high sensitivity is provided. The acceleration sensor has a mass portion formed at a center part of a silicon semiconductor substrate, a frame formed on an edge part of the substrate, thin elastic support arms which are provided on top surfaces of the mass portion and the frame and connect the mass portion and the frame, and strain gauges constituted by a plurality of pairs of piezoresistors formed on top surfaces of the elastic support arms. A distance between a pair of Z-axis strain gauges provided on the top surface of the elastic support arm is made longer by 0.4L to 1.2L or shorter by 1.0L to 1.8L than a distance between a pair of X-axis strain gauges, whereby output of the Z-axis strain gauge is made at the same level as output of the X-axis strain gauge. Alternatively, an angle formed by the Z-axis strain gauge with an X-axis is made 10 to 30 degrees or 65 to 90 degrees, whereby the output of the Z-axis strain gauge is made at the same level as the output of the X-axis strain gauge.

Abstract translation: 提供了一种具有高灵敏度的超小型半导体加速度传感器。 加速度传感器具有形成在硅半导体基板的中心部分的质量部分，形成在基板的边缘部分上的框架，薄的弹性支撑臂设置在质量部分和框架的顶表面上并且连接质量 部分和框架，以及由形成在弹性支撑臂的顶表面上的多对压电电阻器构成的应变计。 设置在弹性支撑臂的顶表面上的一对Z轴应变计之间的距离比一对X轴应变计之间的距离长0.4L至1.2L或更短1.0L至1.8L 由此，Z轴应变计的输出与X轴应变计的输出相同。 或者，由Z轴应变计与X轴形成的角度为10〜30度或65〜90度，由此将Z轴应变计的输出设定为与 X轴应变仪。