公开(公告)号：US20200273594A1

公开(公告)日：2020-08-27

申请号：US16646382

申请日：2018-09-05

Applicant: HITACHI ZOSEN CORPORATION

Inventor： Ryuta TANAKA ,  Ichiro SAKAI ,  Takeshi NODA

IPC: G21K5/04 ,  H01J37/07

Abstract: An electron beam irradiation device includes a vacuum chamber having an electron beam generator inside, a vacuum nozzle, and a window foil on a tip of the vacuum nozzle. The electron beam irradiation device further includes an outer pipe surrounding the vacuum nozzle, a cooling-gas supply unit that supplies cooling gas into a coolant passage formed between the vacuum nozzle and the outer pipe, and a heat-conducting transmission foil fitted to the window foil and contacting the tip of the vacuum nozzle. The heat-conducting transmission foil has a value of at least 63×10−3, which is determined by dividing a thermal conductivity [W/(m·K)] by a density [kg/m3], and a tip part of the vacuum nozzle is made of a material having at least a thermal conductivity of copper.