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公开(公告)号：US3452198A
公开(公告)日：1969-06-24
申请号：US3452198D
申请日：1968-02-23
Applicant: HONEYWELL INC
Inventor： WHITE LORING C
IPC: H01L27/144 , H01J39/00 , G01T1/16
CPC classification number: H01L27/144 , Y10T428/24802
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