公开(公告)号：US20190137440A1

公开(公告)日：2019-05-09

申请号：US16178935

申请日：2018-11-02

Applicant: HONEYWELL INTERNATIONAL INC.

Inventor： Scott Edward BECK ,  Yong-Fa WANG ,  Robert HIGASHI ,  Philip Clayton FOSTER ,  Keith Francis Edwin PRATT ,  Cristian Vasile DIACONU

IPC: G01N27/407 ,  B81B7/00 ,  B81C1/00

Abstract: Apparatus and associated methods relate to a micro-electro-mechanical system (MEMS) based gas sensor including an electrolyte contacting one or more top electrode(s) arranged on the bottom surface of a top semiconductor substrate (TSS), and one or more bottom electrode(s) arranged on the top of a bottom semiconductor substrate (BSS), the TSS and BSS joined with an adhesive seal around the electrolyte, the sensor including one or more capillaries providing gaseous communication to the electrolyte from an external ambient environment. The electrodes may be electrically accessed by one or more vias to externally accessible bond pads. In some examples, an electrical connection may be made from an additional bond pad on top of the TSS to the electrolyte. Various embodiments may reduce the size of various gas sensors to advantageously allow their inclusion into portable electronic devices.