ELECTROCHEMICAL GAS SENSOR CONSTRUCTED WITH MEMS FABRICATION TECHNOLOGY

    公开(公告)号:US20190137440A1

    公开(公告)日:2019-05-09

    申请号:US16178935

    申请日:2018-11-02

    Abstract: Apparatus and associated methods relate to a micro-electro-mechanical system (MEMS) based gas sensor including an electrolyte contacting one or more top electrode(s) arranged on the bottom surface of a top semiconductor substrate (TSS), and one or more bottom electrode(s) arranged on the top of a bottom semiconductor substrate (BSS), the TSS and BSS joined with an adhesive seal around the electrolyte, the sensor including one or more capillaries providing gaseous communication to the electrolyte from an external ambient environment. The electrodes may be electrically accessed by one or more vias to externally accessible bond pads. In some examples, an electrical connection may be made from an additional bond pad on top of the TSS to the electrolyte. Various embodiments may reduce the size of various gas sensors to advantageously allow their inclusion into portable electronic devices.

    FLOW SENSING DEVICE
    2.
    发明申请

    公开(公告)号:US20220136882A1

    公开(公告)日:2022-05-05

    申请号:US17648360

    申请日:2022-01-19

    Abstract: Methods and apparatuses associated with an example flow sensing device are provided. In some examples, the flow sensing device may include a flow cap component and a sensor component. In some examples, the flow cap component may include a heating element disposed in a first layer of the flow cap component. In some examples, the sensor component may include at least one thermal sensing element disposed in a second layer of the sensor component. In some examples, the first layer and the second layer are noncoplanar. In some examples, the flow cap component may be bonded to a first surface of the sensor component to form a flow channel. In some examples, the first layer and the second layer may be noncoplanar and separated by the flow channel.

    FLOW SENSING DEVICE
    3.
    发明申请

    公开(公告)号:US20210396562A1

    公开(公告)日:2021-12-23

    申请号:US16946405

    申请日:2020-06-19

    Abstract: Methods and apparatuses associated with an example flow sensing device are provided. In some examples, the flow sensing device may include a flow cap component and a sensor component. In some examples, the flow cap component may include a heating element disposed in a first layer of the flow cap component. In some examples, the sensor component may include at least one thermal sensing element disposed in a second layer of the sensor component. In some examples, the first layer and the second layer are noncoplanar. In some examples, the flow cap component may be bonded to a first surface of the sensor component to form a flow channel. In some examples, the first layer and the second layer may be noncoplanar and separated by the flow channel.

    SENSORS, METHODS, AND COMPUTER PROGRAM PRODUCTS FOR AIR BUBBLE DETECTION

    公开(公告)号:US20220128418A1

    公开(公告)日:2022-04-28

    申请号:US17078902

    申请日:2020-10-23

    Abstract: Sensors, methods, and computer program products for air bubble detection are provided. An example method includes determining a first moving average for a first period of time based upon first temperature data and determining a second moving average for the first period of time based upon second temperature data. The method includes determining a first air presence parameter based upon a comparison between the first temperature data and the first moving average and a comparison between the second temperature data and the second moving average. The method includes determining a second air presence parameter based upon a comparison between the first temperature data, the second temperature data, and calibrated air thresholds. The method includes determining a third air presence parameter based upon a comparison between a first temperature data entry and each second temperature data entry. An air bubble within a fluid flow system is detected based upon the parameters.

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