公开(公告)号：US20210010928A1

公开(公告)日：2021-01-14

申请号：US16980806

申请日：2019-03-14

Applicant: HORIBA FRANCE SAS

Inventor： Olivier ACHER ,  Alexander PODZOROV ,  Thanh-Liem NGUYEN ,  Brice VILLIER ,  Géraldine MELIZZI ,  Jean-Paul GASTON

IPC: G01N21/21 ,  G02B27/10 ,  G02B5/30

Abstract: Disclosed is an ellipsometer or scatterometer including a light source, a polarizer, an optical illumination system suitable for directing an incident polarized light beam towards a sample, a wavefront-division optical beam splitter arranged to receive a secondary light beam produced by reflection, transmission or diffraction, the wavefront-division optical beam splitter being oriented to form three collimated split beams, an optical polarization modification device and an optical polarization splitting device to form six angularly split beams, a detection system suitable for detecting the six split beams, and a processing system suitable for deducing therefrom an ellipsometric or scatterometric measurement.