公开(公告)号：US10670458B2

公开(公告)日：2020-06-02

申请号：US16091837

申请日：2017-04-03

Applicant: HORIBA FRANCE SAS

Inventor： Simon Richard ,  Sébastien Laden ,  Dmitri Kouznetsov

IPC: G01J3/28 ,  G01J3/44 ,  G01N21/64 ,  G01N21/65 ,  G06T3/40 ,  G01J3/02

Abstract: Disclosed is a method for acquiring and forming a spectrometry image, including the following steps: a) acquiring an initial structural image of an area of a sample; b) breaking down the initial structural image so as to determine a multi-scale spatial sample of the area of the sample; c) determining a plurality of spectrometry measurement positions in the area of the sample, as a function of the multi-scale spatial sampling determined in step b); d) consecutively, for each spectrometry measurement position determined in step c), positioning the excitation beam and acquiring a spectrometry measurement; and e) reconstructing a spectrometry image point-by-point from the spectrometry measurements acquired in step d).