REFLECTIVE DIFFRACTION GRATING RESISTANT TO AN ULTRA-SHORT-PULSE LIGHT FLUX WITH HIGH PEAK POWER AND METHOD FOR THE PRODUCTION THEREOF

    公开(公告)号:US20220179137A1

    公开(公告)日:2022-06-09

    申请号:US17594466

    申请日:2020-04-17

    Abstract: Disclosed is a reflective diffraction grating including at least one intermediate metal layer arranged between the external reflective layer and a surface of the substrate including the grating lines, the external reflective layer being consisted of a first metal and the intermediate metal layer being consisted of another metal, the other metal having a higher electron-phonon coupling coefficient than the electron-phonon coupling coefficient of the first metal or metal alloy, the external reflective layer having a thickness in a range having a lower limit determined by a reflection coefficient of the first metal and an upper limit determined by a thermal diffusion length of the first metal, and the intermediate metal layer having another thickness greater than a minimum value in such a way as to increase the high peak power ultrashort pulse light flux resistance of the reflective diffraction grating.

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