公开(公告)号：US20190315621A1

公开(公告)日：2019-10-17

申请号：US16376970

申请日：2019-04-05

Applicant: HRL Laboratories, LLC

Inventor： Deborah J. KIRBY ,  Raviv PERAHIA ,  Hung NGUYEN ,  Frederic P. STRATTON ,  David T. CHANG

IPC: B81C1/00 ,  B81B3/00

Abstract: A device preferably for use in an inertial navigation system the device having a single IC wafer; a plurality of sensors bonded to bond regions on said single IC wafer, at least one of said bond regions including an opening therein in gaseous communication with a pressure chamber associated with at least one of the plurality of said sensors; and a plurality of caps encapsulating said plurality of sensors, at least one of said plurality of caps forming at least a portion of said pressure chamber. A method of making the device is also disclosed.