FM demodulation system for quartz MEMS magnetometer

    公开(公告)号:US10175307B1

    公开(公告)日:2019-01-08

    申请号:US14997203

    申请日:2016-01-15

    Abstract: A magnetometer system has a magnetometer, an interface circuit and an electronic demodulator, the interface circuit being coupled to sense electrodes disposed on the magnetometer and the demodulator being coupled to the interface circuit. Preferably, the magnetometer has a loop electrode which follows an outline of the shape of an active portion of the magnetometer and wherein the electronic demodulator has an output for driving the loop electrode of the magnetometer. Preferably, the magnetometer includes a quartz plate with flexural and thickness shear vibratory modes and wherein the flexural vibratory mode is driven, in use, into vibration by the electronic demodulator and wherein the thickness shear vibratory mode is driven, in use, into vibration by the interface circuit.

Patent Agency Ranking