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公开(公告)号:US20150351285A1
公开(公告)日:2015-12-03
申请号:US14612934
申请日:2015-02-03
发明人: Suguru NODA , Nuri NA , Mizuhisa NIHEI
CPC分类号: H05K7/20509 , B82Y30/00 , B82Y40/00 , C01B32/16 , C01B2202/08 , C23C16/0272 , C23C16/26 , H01L23/373 , H01L23/3735 , H01L23/3736 , H01L2924/0002 , Y10S977/722 , Y10S977/843 , Y10S977/902 , H01L2924/00
摘要: A heat dissipation structure and a synthesizing method thereof are provided by the present disclosure. The method comprises: providing a metal foil; forming a deposition substrate on a first surface of the metal foil, wherein the deposition substrate includes a barrier layer disposed on the metal foil and a catalyst layer disposed on the barrier layer, such that catalyst in the catalyst layer is prevented from diffusing into the metal foil; and synthesizing a carbon nanotube array on the deposition substrate formed on the first surface. The method provided by the present disclosure can increase density of the CNTs in the heat dissipation structure.
摘要翻译: 散热结构及其合成方法由本发明提供。 该方法包括:提供金属箔; 在金属箔的第一表面上形成沉积衬底,其中沉积衬底包括设置在金属箔上的阻挡层和设置在阻挡层上的催化剂层,使得催化剂层中的催化剂不被扩散到金属中 挫败; 以及在形成在第一表面上的沉积基板上合成碳纳米管阵列。 通过本公开提供的方法可以增加散热结构中的CNT的密度。