公开(公告)号：US20230165171A1

公开(公告)日：2023-05-25

申请号：US17767927

申请日：2021-12-01

Applicant: HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Hao TONG ,  Lun WANG ,  Weiguo WANG ,  Xiangshui MIAO

IPC: H10N70/20 ,  H10N70/00 ,  H10B63/00

CPC classification number: H10N70/231 ,  H10N70/8845 ,  H10N70/841 ,  H10N70/026 ,  H10N70/023 ,  H10B63/80 ,  H10N70/882

Abstract: A selector with a superlattice-like structure and a preparation method thereof are provided, which belong to the technical field of micro-nano electronics. The selector includes a substrate, and a first metal electrode layer, a superlattice-like layer, and a second metal electrode layer sequentially stacked on the substrate. The superlattice-like layer includes n+1 first sublayers and n second sublayers alternately stacked periodically. A material of the first sublayer is amorphous carbon, and a material of the second sublayer is a chalcogenide with gating property.