公开(公告)号：US5373240A

公开(公告)日：1994-12-13

申请号：US189914

申请日：1994-02-01

Applicant: Haas Guenter

Inventor： Haas Guenter

IPC: G01L21/30 ,  G01L21/32 ,  H01J41/04

CPC classification number: G01L21/32 ,  H01J41/04

Abstract: A hot cathode ionization pressure gauge with the following electrodes, arged at a distance from one another in the specified sequence along an axis:a) a thermionic cathode filament which has a central active part and lateral support parts;b) an essentially flat, diaphragm-like control electrode,c) an essentially flat apertured acceleration electrode andd) an essentially flat ion collector electrode,and with a base plate on which the control electrode, the acceleration electrode and ion collector electrode are mounted, in each case via support means running at right angles to the main part of the relevant electrode and via a support bolt connected to the support means.

Abstract translation: 一种具有以下电极的热阴极电离压力计，沿着一个轴线以规定的顺序彼此间隔一定距离：a）具有中心活性部分和侧向支撑部分的热离子阴极细丝; b）基本上平坦的隔膜状控制电极，c）基本上平坦的有孔加速电极，以及d）基本上平坦的离子集电极电极，以及其上安装有控制电极，加速电极和离子集电极的基板 在每种情况下都经由与相关电极的主要部分成直角运行的支撑装置，并且经由连接到支撑装置的支撑螺栓。