公开(公告)号：US09718215B2

公开(公告)日：2017-08-01

申请号：US14687819

申请日：2015-04-15

申请人： Halo Industries, Inc.

发明人： Andrew Bollman ,  Andrei Iancu ,  Philip Van Stockum

IPC分类号： B28D5/00 ,  H01L21/78 ,  B26F3/00

CPC分类号： B28D5/0011 ,  B26F3/002 ,  B28D5/0023 ,  H01L21/78

摘要： Controllable cleavage of a work piece is achieved through the use of capacitive clamps and application of a large tensile force. Capacitive clamps are used to secure the ends of a work piece with strong electrostatic forces. The capacitive clamps secure the ends of the work piece by creating electrostatic forces like those experienced by the plates in a parallel plate capacitor. After introduction of a crack along a side surface of the work piece, the application of a tensile force along the central axis of the work piece causes the crack to rapidly propagate and cleave the work piece into two or more pieces.

公开(公告)号：US20160303764A1

公开(公告)日：2016-10-20

申请号：US14687819

申请日：2015-04-15

申请人： Halo Industries, Inc.

发明人： Andrew Bollman ,  Andrei Iancu ,  Philip Van Stockum

IPC分类号： B28D5/00 ,  H01L21/78 ,  B26F3/00

CPC分类号： B28D5/0011 ,  B26F3/002 ,  B28D5/0023 ,  H01L21/78

摘要： Controllable cleavage of a work piece is achieved through the use of capacitive clamps and application of a large tensile force. Capacitive clamps are used to secure the ends of a work piece with strong electrostatic forces. The capacitive clamps secure the ends of the work piece by creating electrostatic forces like those experienced by the plates in a parallel plate capacitor. After introduction of a crack along a side surface of the work piece, the application of a tensile force along the central axis of the work piece causes the crack to rapidly propagate and cleave the work piece into two or more pieces.

摘要翻译： 通过使用电容夹具和施加大的拉力来实现工件的可控切​​割。 电容式夹具用于固定具有强静电力的工件端部。 电容式夹具通过产生静电力来固定工件的端部，如平行板电容器中的板所经受的那样。 在沿着工件的侧面引入裂纹之后，沿着工件的中心轴施加张力使得裂纹快速传播并将工件劈开成两片以上。