Process for imaging laserinterferometry and a laserinterferometer for
carrying out said process
    1.
    发明授权
    Process for imaging laserinterferometry and a laserinterferometer for carrying out said process 失效
    用于成像激光干涉测量的方法和用于执行所述方法的激光干涉仪

    公开(公告)号:US4838694A

    公开(公告)日:1989-06-13

    申请号:US113275

    申请日:1987-09-09

    IPC分类号: G01B11/06

    CPC分类号: G01B11/0675

    摘要: The present invention relates to a laserinterferometric process, in particular, for use in etching thin layers, whereby a layer to be examined is radiated with a laser passing over a surface of the layer and the intensity of the reflected laser beam, which is composed of a beam reflected from the surface of the layer to be examined and one reflected from its lower interface is ascertained and evaluated by a data processing system from which the information concerning the layer to be examined is read out. The present invention also relates to an imaging laserinterferometer comprising a modulator, which deflects the laser beam, a detector for the reflected laser beam and a data processing systen, which analyzes the detector signals.

    摘要翻译: PCT No.PCT / DE87 / 00002 Sec。 371日期1987年9月9日第 102(e)1987年9月9日PCT PCT 1987年1月8日PCT公布。 公开号WO87 / 04237 日期1987年7月16日。本发明涉及一种激光干涉测量方法,特别涉及用于蚀刻薄层的激光干涉测量方法,由此通过激光穿过该层的表面和被反射的强度照射被检查层 由从被检查层的表面反射的光束和从其下部接口反射的光束构成的激光束由数据处理系统确定和评估,从该数据处理系统读出关于被检查层的信息。 本发明还涉及一种成像激光干涉仪,其包括使激光束偏转的调制器,用于反射的激光束的检测器和分析检测器信号的数据处理系统。

    Wheelchair, particularly electric wheelchair
    2.
    发明申请
    Wheelchair, particularly electric wheelchair 有权
    轮椅,特别是电动轮椅

    公开(公告)号:US20060138835A1

    公开(公告)日:2006-06-29

    申请号:US10525048

    申请日:2003-09-04

    IPC分类号: A47C1/02

    摘要: Disclosed is a wheelchair, particularly an electric wheelchair, comprising a frame (20), at least one steerable wheel (3), two non-steerable wheels (5) which are connected to the frame (20) at a wheelbase (R), and a seat (10) that is fastened to the frame (20) and is provided with a back rest (8). The inventive wheelchair is characterized by the fact that the wheelbase (R) is adjustable.

    摘要翻译: 公开了一种轮椅,特别是电动轮椅,其包括框架(20),至少一个可转向轮(3),两个非转向轮(5),其在轴距(R)处连接到框架(20) 以及固定到所述框架(20)并且设置有靠背(8)的座(10)。 本发明的轮椅的特征在于轴距(R)是可调节的。

    Wheelchair, particularly electric wheelchair
    3.
    发明授权
    Wheelchair, particularly electric wheelchair 有权
    轮椅,特别是电动轮椅

    公开(公告)号:US07278653B2

    公开(公告)日:2007-10-09

    申请号:US10525048

    申请日:2003-09-04

    IPC分类号: A61G5/04 A61G5/00

    摘要: Disclosed is a wheelchair, particularly an electric wheelchair, comprising a frame (20), at least one steerable wheel (3), two non-steerable wheels (5) which are connected to the frame (20) at a wheelbase (R), and a seat (10) that is fastened to the frame (20) and is provided with a back rest (8). The inventive wheelchair is characterized by the fact that the wheelbase (R) is adjustable.

    摘要翻译: 公开了一种轮椅,特别是电动轮椅,其包括框架(20),至少一个可转向轮(3),两个非转向轮(5),其在轴距(R)处连接到框架(20) 以及固定到所述框架(20)并且设置有靠背(8)的座(10)。 本发明的轮椅的特征在于轴距(R)是可调节的。