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1.发明申请公开(公告)号：US20190033054A1
公开(公告)日：2019-01-31
申请号：US16042383
申请日：2018-07-23
发明人： Matthias Vaupel , Nils Langholz
CPC分类号： G01B9/02042 , G01B11/06 , G01B11/0625 , G01B11/0675 , G02B21/008
摘要： A confocal microscope for determination of a layer thickness comprises: a focus adjusting device configured to adjust a relative displacement between a focus position of the illumination light and a specimen position along an optical axis, wherein measurement signals belonging to different settings of the focus adjusting device can be recorded; an evaluation device for determining a specimen layer thickness as follows: determine intensity band positions of two intensity bands in a measurement graph recorded by a light measuring device, the measurement graph indicating a light intensity in dependence of the focus position; determine a layer thickness on the basis of a positional difference between the intensity band positions; and determine the layer thickness using a mathematical model which describes for overlapping intensity bands a dependence of the intensity band positions on a light wavelength and the layer thickness, considering interference of the illumination light at the layer.
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公开(公告)号：US20180299255A1
公开(公告)日：2018-10-18
申请号：US15486146
申请日：2017-04-12
申请人： Applejack 199 L.P.
CPC分类号： G01B11/0675 , G01B9/02017 , G01B9/02044 , G01B2210/56 , G01B2290/25
摘要： Inspecting a multilayer sample. In one example embodiment, a method may include receiving, at a beam splitter, light and splitting the light into first and second portions; combining, at the beam splitter, the first portion of the light after being reflected from a multilayer sample and the second portion of the light after being reflected from a reflector; receiving, at a computer-controlled system for analyzing Fabry-Perot fringes, the combined light and spectrally analyzing the combined light to determine a value of a total power impinging a slit of the system for analyzing Fabry-Perot fringes; determining an optical path difference (OPD); recording an interferogram that plots the value versus the OPD for the OPD; performing the previous acts of the method one or more additional times with a different OPD; and using the interferogram for each of the different OPDs to determine the thicknesses and order of the layers of the multilayer sample.
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公开(公告)号：US20180252512A1
公开(公告)日：2018-09-06
申请号：US15775289
申请日：2016-11-08
申请人： NTN CORPORATION
发明人： Hiroaki OHBA
CPC分类号： G01B11/0675 , B05C1/027 , B05C5/02 , B05C11/1018 , G01B9/02012 , G01B9/0209 , G01B11/0608 , G01B11/0683 , G01B2210/48
摘要： A height detection apparatus successively changes the brightness of white light from a first level to a second level in accordance with a position of a Z stage and captures an image of interference light while moving a two-beam interference objective lens relative to a paste film in an optical axis direction, detects, as a focus position, a position of the Z stage where the intensity of interference light is highest in a period during which the brightness of white light is set to the first or second level, for each pixel of the captured image, and obtains the height of the paste film based on a detection result.
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公开(公告)号：US10005999B2
公开(公告)日：2018-06-26
申请号：US15071921
申请日：2016-03-16
发明人： Curtis J. Larimer , Jonathan D. Suter , Raymond S. Addleman , George T. Bonheyo , Michelle R. Brann
CPC分类号： C12M41/46 , C12M23/12 , C12M23/22 , C12M23/58 , C12M29/10 , C12M41/36 , C12M41/48 , G01B9/02021 , G01B9/0209 , G01B11/0675 , G01B11/2441 , G01N33/48
摘要： An apparatus and method of measuring biofilm and biological activity on a surface is disclosed. The apparatus includes a biofilm, which includes one or more microorganisms, grown on a substrate. A viewing window is placed on a surface of the biofilm and a gas bubble is introduced between the viewing window and the surface of the biofilm. The space between the substrate and the viewing window may be enclosed in a casing that has an inlet and an outlet, forming a flow cell. A microscope system, such as a white light interferometer, captures data of the biofilm in situ and non-destructively. The 3D images of biofilm surface have high resolution while maintaining a large field of view. The apparatuses and methods will be useful for fundamental studies of biofilms, biomedical and environmental screening, and many other applications in biology and the life sciences.
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公开(公告)号：US20170332897A1
公开(公告)日：2017-11-23
申请号：US15671413
申请日：2017-08-08
发明人： Yoel Arieli , Yoel Cohen , Shlomi Epstein , Dror Arbel , Ra'anan Gefen
CPC分类号： A61B3/101 , A61B3/0025 , A61B3/1005 , A61B3/152 , G01B9/02021 , G01B9/02025 , G01B9/02027 , G01B9/02044 , G01B9/02087 , G01B9/0209 , G01B11/06 , G01B11/0625 , G01B11/0675 , G01B2290/45 , G01N21/274 , G01N2201/066 , G01N2201/127 , G02B3/08
摘要： Apparatus and methods are described for performing structure measurement on a tear film of an eye of a subject. At least a portion of a surface of the tear film is illuminated using a broadband light source. A spectrum of light of the broadband light that is reflected from at least one point of the tear film is measured, using a spectrometer. Color information for a plurality of points of the tear film is obtained, by imaging a field of view of the tear film using a color camera. Using a processing unit, data from the color camera and data from the spectrometer that are indicative of characteristics of the tear film are received, and based upon a combination of the data received from the color camera and the data received from the spectrometer, an output is generated that is indicative of a structure of the tear film.
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公开(公告)号：US20170314914A1
公开(公告)日：2017-11-02
申请号：US15581009
申请日：2017-04-28
CPC分类号： G01B11/2441 , G01B9/02049 , G01B11/0625 , G01B11/0675 , G01J3/26 , G01J2003/123 , G01J2003/1243 , G01J2003/2866 , G01N21/255 , G01N21/45 , G01N21/8422 , G01N2021/8427
摘要： A system comprising a light source, and a retention device configured to receive and retain a sample for measurement. The system includes a detector. An optical path couples light between the light source, the sample when present, and the detector. An optical objective is configured to couple light from the light source to the sample when present, and couple reflected light to the detector. A controller is configured to automatically control focus and/or beam path of the light directed by the optical objective to the sample when present. The detector is configured to output data representing a film thickness and a surface profile of the sample when present.
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7.发明申请公开(公告)号：US20170299374A1
公开(公告)日：2017-10-19
申请号：US15638723
申请日：2017-06-30
发明人： Robert Laird STEWART
CPC分类号： G01B11/0641 , G01B11/0675 , G01N21/23
摘要： A method of authenticating a polymer film comprises measuring the thickness of a layer therein by white light interferometry and/or measuring the birefringence of a layer therein. The method, and devices to carry out the method, may be used in security applications, for example to test for counterfeit bank notes.
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公开(公告)号：US20170284791A1
公开(公告)日：2017-10-05
申请号：US15627948
申请日：2017-06-20
发明人： Yangkun JING , Changjun JIANG
CPC分类号： G01B11/0675 , G01B9/02016 , G01B9/0203 , G01B11/0616 , G01J2009/0238
摘要： The present invention provides a detection device and a detection method. The detection device comprises a light source module, a receiving module, an image generation module and a judgment module. The light source module is configured to emit light towards a film at a predetermined angle, the receiving module is configured to receive interference light formed by first reflected light reflected by an upper surface of the film and second reflected light reflected by a lower surface of the film, the image generation module is configured to generate an equal thickness interference fringe image according to the interference light, and the judgment module is configured to judge whether thickness of the film is uniform according to the equal thickness interference fringe image. The detection device can perform high accuracy detection on uniformity of the thickness of a film, thereby facilitating improving display quality of a display panel.
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公开(公告)号：US09696138B2
公开(公告)日：2017-07-04
申请号：US14236613
申请日：2012-07-31
申请人： Xiaoke Wan , Jian Ge
发明人： Xiaoke Wan , Jian Ge
CPC分类号： G01B11/06 , G01B9/02021 , G01B9/02022 , G01B9/02027 , G01B9/0207 , G01B9/0209 , G01B11/0675 , G01N21/45
摘要： A scanning monochromatic spatial low-coherent interferometer (S-LCI) can be used to simultaneously measure geometric thickness and refractive index. The probe beam of the scanning S-LCI can be an off-axis converging single wavelength laser beam, and the decomposed incident angles of the beam on the sample can be accurately defined in the Fourier domain. The angle dependent phase shift of a plane parallel plate or other sample can be obtained in a single system measurement. From the angle dependent phase shift, the geometric thickness and refractive index of the sample can be simultaneously obtained. Additionally or alternatively, the S-LCI system can interrogate the sample to profile the location and refractive index of one or more layers within the sample using the disclosed techniques.
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公开(公告)号：US09690207B2
公开(公告)日：2017-06-27
申请号：US14436046
申请日：2013-09-10
CPC分类号： G03F7/70775 , G01B11/0675 , G01B11/14 , G03F7/70483 , G03F7/70525 , G03F9/7046 , G03F9/7049 , G03F9/7092
摘要： A sensor system to measure a physical quantity, the system including a parallel detection arrangement with multiple detectors to allow measurements in parallel at different spatial locations, wherein the multiple detectors share a noise source, wherein the sensor system is configured such that the multiple detectors each output a signal as a function of the physical quantity, and wherein the sensor system is configured such that at least one detector responds differently to noise originating from the shared noise source than the one or more other detectors.
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