公开(公告)号：US12124228B1

公开(公告)日：2024-10-22

申请号：US18731174

申请日：2024-05-31

Applicant: Harbin Institute of Technology

Inventor： Fazhi Song ,  Kaixin Liu ,  Shuaiqi Chen ,  Yang Liu ,  Jiubin Tan

IPC: G05B13/02 ,  G05B19/19

CPC classification number: G05B13/0265 ,  G05B19/19 ,  G05B2219/34048 ,  G05B2219/41439 ,  G05B2219/41453

Abstract: A learning control system for a nano-precision motion stage comprises a closed-loop feedback section including a motion trajectory generator, a feedback controller, a motion stage, and a first Fourier transformer; and a feedforward section including a second Fourier transformer, a learning controller, an iteration backward shift operator, and a Fourier inverse transformer. An iteration experiment count j is initialized as j=1, and a j-th frequency domain feedforward signal is initialized to 0; the system is run to collect a frequency domain error signal and a frequency domain position measurement signal; a (j+1)-th frequency domain feedforward signal is updated; and an iteration experiment count j is incremented by 1. The present disclosure can effectively suppress the influence of external noise and disturbances, and improve convergence performance. Moreover, the present disclosure requires less computation, achieves simple determination of learning gains and strong robustness, and is convenient for engineering applications.