Backlash acceleration control method
    1.
    发明授权
    Backlash acceleration control method 失效
    间隙加速控制方法

    公开(公告)号:US5367238A

    公开(公告)日:1994-11-22

    申请号:US934662

    申请日:1993-01-21

    Abstract: A backlash acceleration control method capable of more accurately setting a timing for an initiation for a backlash acceleration correction in a servo system that carries out a feedforward control compared with conventional methods. According to this method, the backlash acceleration correction is initiated at the time when the feedforward amount is reversed from positive to negative or vice versa. Furthermore, this initiation time for the backlash acceleration correction can also be determined according to the point of change of the sign of a speed command modified by the feed forward amount. When the feedforward coefficient becomes close to "1", the positional deviation becomes almost "0", and therefore an actual shift movement comes to follow the shift command without time lag. Accordingly, a point where a shift direction of the shift command is reversed will be dispersed, and so an initiation time for the backlash acceleration correction cannot be determined accurately. However, a point (Ts), where a sign of the feedforward amount is reversed, can accurately represent the turning point of the shift direction.

    Abstract translation: PCT No.PCT / JP92 / 00666 Sec。 371日期:1993年1月21日 102(e)日期1993年1月21日PCT提交1992年5月22日PCT公布。 出版物WO92 / 21075 日期:1992年11月26日。与常规方法相比,能够更精确地设定与执行前馈控制的伺服系统中的间隙加速度校正的启动定时的间隙加速度控制方法。 根据该方法,在前馈量从正反转到反向时启动间隙加速度校正。 此外,还可以根据由前馈量修改的速度指令的符号的变化点来确定该间隙加速度校正的该起始时间。 当前馈系数接近于“1”时,位置偏差几乎为“0”,因此实际的偏移运动跟随移位指令而没有时间滞后。 因此,变速指令的换档方向相反的点将被分散,因此无法准确地确定齿隙加速度校正的起动时间。 然而,前馈量的符号反转的点(Ts)能够精确地表示换档方向的转折点。

    PROCESSING MACHINE WHICH TAKES INTO ACCOUNT POSITION ERRORS DURING COLLISION CHECKING
    2.
    发明申请
    PROCESSING MACHINE WHICH TAKES INTO ACCOUNT POSITION ERRORS DURING COLLISION CHECKING 审中-公开
    在碰撞检查期间进入帐户位置错误的处理机

    公开(公告)号:US20150261201A1

    公开(公告)日:2015-09-17

    申请号:US14657634

    申请日:2015-03-13

    Abstract: A numerical controller of a processing machine determines corresponding setpoint axis values based on setpoint position values for position-regulated axes operating on machine elements. Before controlling the position-regulated axes, volumes to be occupied by protection bodies associated with the machine elements, a workpiece and a tool are defined and it is checked whether the protection bodies remain disjoint while controlling the position-regulated axes. Depending on the result of the checks, the controller either controls the position-regulated axes in accordance with the setpoint position values or merely executes an error response without control. The controller contains a position error field which specifies for any given setpoint axis value an actual position the tool relative to the workpiece. The position error field is taken into consideration, at least for a subset of the protection bodies, when defining the volumes to be occupied by the protection bodies upon activation of the position-regulated axes.

    Abstract translation: 加工机的数字控制器根据在机械元件上运行的位置调节轴的设定点位置值来确定相应的设定点轴值。 在控制位置调节轴之前,定义要与机器元件相关的保护体所占据的体积,工件和工具,并且在控制位置调节轴时检查保护体是否不相交。 根据检查的结果,控制器可以根据设定值位置值控制位置调节轴,或仅在不进行控制的情况下执行错误响应。 控制器包含一个位置误差字段,用于为任何给定的设定点轴值指定刀具相对于工件的实际位置。 至少对于保护体的一个子集,当确定在激活位置调节轴时由保护体占据的体积时,考虑位置误差场。

    Control device with servocontrol loop, particularly an electro-hydraulic flight control actuator
    3.
    发明授权
    Control device with servocontrol loop, particularly an electro-hydraulic flight control actuator 有权
    具有伺服控制回路的控制装置,特别是电动液压飞行控制执行器

    公开(公告)号:US07139643B2

    公开(公告)日:2006-11-21

    申请号:US10346827

    申请日:2003-01-17

    Abstract: A control device includes a main servocontrol loop having a servocontrolled system, and a compensation device on the input side of the control device. The control device includes an internal loop that receives a first signal derived from the main servocontrol loop as input, and generates, as a function firstly of the first signal and secondly of a second signal characteristic of a parameter of the servocontrolled system, an error signal characteristic of the difference between said second signal and a theoretical signal determined using a model. The error signal being injected into the main servocontrol loop to correct the control of the servocontrolled system. The internal loop and/or the main loop include a variable gain amplifier, and the control device controls the gain of the variable gain amplifier.

    Abstract translation: 控制装置包括具有伺服控制系统的主伺服控制回路和在控制装置的输入侧的补偿装置。 控制装置包括内部循环,其接收从主伺服控制回路得到的第一信号作为输入,并且产生作为第一信号的函数,其次产生伺服控制系统的参数的第二信号特性的误差信号 所述第二信号与使用模型确定的理论信号之间的差的特性。 误差信号被注入主伺服控制回路以纠正伺服控制系统的控制。 内部环路和/或主环路包括可变增益放大器,并且控制装置控制可变增益放大器的增益。

    Control device with servocontrol loop, particularly an electro-hydraulic flight control actuator
    4.
    发明申请
    Control device with servocontrol loop, particularly an electro-hydraulic flight control actuator 有权
    具有伺服控制回路的控制装置,特别是电动液压飞行控制执行器

    公开(公告)号:US20060041339A1

    公开(公告)日:2006-02-23

    申请号:US10346827

    申请日:2003-01-17

    Abstract: Control device comprising a main servocontrol loop that comprises a servocontrolled device, and compensation means on the input side of this servocontrolled device, the said device comprising a secondary loop that receives a signal derived from the servocontrol loop as input, and generates an error characteristic of the difference between a signal characteristic of a parameter of the servocontrolled device and a theoretical signal determined using a model, as a function firstly of this input signal and secondly of the said signal characteristic of a parameter of the servocontrolled device, this error signal being injected into the main loop to correct the control of the servocontrolled device, characterised in that the secondary loop and/or the main loop comprise at least one variable gain amplifier, the said device comprising means for controlling the gain of the said amplifier as a function firstly of the said signal characteristic of a state of the servocontrolled device, and secondly a signal derived from the main loop on the input side of the said device.

    Abstract translation: 控制装置包括主伺服控制回路,其包括伺服控制装置,以及在该伺服控制装置的输入侧的补偿装置,所述装置包括接收从作为输入的伺服控制回路得到的信号的次级回路,并产生误差特性 伺服控制装置的参数的信号特性与使用模型确定的理论信号之间的差异作为该输入信号的第一个函数,其次是伺服控制装置的参数的所述信号特性的函数,该误差信号被注入 进入主循环以校正伺服控制装置的控制,其特征在于,次级回路和/或主回路包括至少一个可变增益放大器,所述装置包括用于首先控制所述放大器的增益的装置 的伺服控制装置的状态的所述信号特性,其次 来自所述设备的输入侧的主循环的信号。

    Learning control system and method for nano-precision motion stage

    公开(公告)号:US12124228B1

    公开(公告)日:2024-10-22

    申请号:US18731174

    申请日:2024-05-31

    Abstract: A learning control system for a nano-precision motion stage comprises a closed-loop feedback section including a motion trajectory generator, a feedback controller, a motion stage, and a first Fourier transformer; and a feedforward section including a second Fourier transformer, a learning controller, an iteration backward shift operator, and a Fourier inverse transformer. An iteration experiment count j is initialized as j=1, and a j-th frequency domain feedforward signal is initialized to 0; the system is run to collect a frequency domain error signal and a frequency domain position measurement signal; a (j+1)-th frequency domain feedforward signal is updated; and an iteration experiment count j is incremented by 1. The present disclosure can effectively suppress the influence of external noise and disturbances, and improve convergence performance. Moreover, the present disclosure requires less computation, achieves simple determination of learning gains and strong robustness, and is convenient for engineering applications.

    Position control apparatus including iterative learning circuit, exposure apparatus, method for manufacturing device, and iterative learning method for use in position control apparatus having iterative learning circuit including learning filter
    6.
    发明授权
    Position control apparatus including iterative learning circuit, exposure apparatus, method for manufacturing device, and iterative learning method for use in position control apparatus having iterative learning circuit including learning filter 有权
    位置控制装置,包括迭代学习电路,曝光装置,制造装置的方法和迭代学习方法,用于具有迭代学习电路的位置控制装置,包括学习滤波器

    公开(公告)号:US08676355B2

    公开(公告)日:2014-03-18

    申请号:US12393871

    申请日:2009-02-26

    Applicant: Kiyoshi Takagi

    Inventor: Kiyoshi Takagi

    Abstract: A position control apparatus includes a detecting unit configured to detect a position of a control target, a subtracting unit configured to subtract an output of the detecting unit from a target value, an iterative learning control circuit including a filter into which a deviation between the output of the detecting unit and the target value is input, where the iterative learning control circuit feeds forward a control input to the control target, and a parameter computing unit configured to compute a variation in a parameter of the control target. A characteristic of the filter is changed in accordance with the variation in the parameter of the control target.

    Abstract translation: 一种位置控制装置,包括:检测单元,被配置为检测控制对象的位置;减法单元,被配置为从目标值中减去所述检测单元的输出;迭代学习控制电路,包括滤波器,所述滤波器的输出 输入检测单元和目标值,其中迭代学习控制电路向控制目标馈送控制输入;以及参数计算单元,被配置为计算控制目标的参数的变化。 滤波器的特性根据控制目标的参数的变化而改变。

    POSITION CONTROL APPARATUS INCLUDING ITERATIVE LEARNING CIRCUIT, EXPOSURE APPARATUS, METHOD FOR MANUFACTURING DEVICE, AND ITERATIVE LEARNING METHOD FOR USE IN POSITION CONTROL APPARATUS HAVING ITERATIVE LEARNING CIRCUIT INCLUDING LEARNING FILTER
    7.
    发明申请
    POSITION CONTROL APPARATUS INCLUDING ITERATIVE LEARNING CIRCUIT, EXPOSURE APPARATUS, METHOD FOR MANUFACTURING DEVICE, AND ITERATIVE LEARNING METHOD FOR USE IN POSITION CONTROL APPARATUS HAVING ITERATIVE LEARNING CIRCUIT INCLUDING LEARNING FILTER 有权
    位置控制装置,包括迭代学习电路,曝光装置,制造装置的方法以及用于具有包括学习过滤器的迭代学习电路的位置控制装置的迭代学习方法

    公开(公告)号:US20090222109A1

    公开(公告)日:2009-09-03

    申请号:US12393871

    申请日:2009-02-26

    Applicant: Kiyoshi Takagi

    Inventor: Kiyoshi Takagi

    Abstract: A position control apparatus includes a detecting unit configured to detect a position of a control target, a subtracting unit configured to subtract an output of the detecting unit from a target value, an iterative learning control circuit including a filter into which a deviation between the output of the detecting unit and the target value is input, where the iterative learning control circuit feeds forward a control input to the control target, and a parameter computing unit configured to compute a variation in a parameter of the control target. A characteristic of the filter is computed in accordance with the variation in the parameter of the control target.

    Abstract translation: 一种位置控制装置,包括:检测单元,被配置为检测控制对象的位置;减法单元,被配置为从目标值中减去所述检测单元的输出;迭代学习控制电路,包括滤波器,所述滤波器的输出 输入检测单元和目标值,其中迭代学习控制电路向控制目标馈送控制输入;以及参数计算单元,被配置为计算控制目标的参数的变化。 根据控制对象的参数的变化计算滤波器的特性。

    Servo motor control device
    8.
    发明授权
    Servo motor control device 失效
    伺服电动机控制装置

    公开(公告)号:US5248921A

    公开(公告)日:1993-09-28

    申请号:US949725

    申请日:1992-09-23

    CPC classification number: G05B19/19 G05B2219/41431 G05B2219/41439

    Abstract: In a control device for controlling a servo motor driving a robot arm, a target position command signal is input to a first operation section, which generates a speed command value for the speed feedforward. The target position command signal is also input to a delay section. A target position command signal delayed by a time period is obtained by the delay section and supplied to a second operation section. A positional deviation between the target position command signal and a position feedback signal is calculated by the second operation section. The obtained positional deviation is input to a third operation section and generated as a speed compensation command signal. A speed command signal obtained by addition of the speed feedforward signal and the speed compensation command signal is supplied to a servo driver for driving the servo motor. As a result, the time lag in the response of a system of the controlled system after the servo driver can be compensated for and an error in the positional deviation or the speed command signal can be prevented from being increased.

Patent Agency Ranking